Filtration accuracy 0.3um (95%)
The "exhaust gas treatment unit" is the optimal solution for addressing exhaust gas issues arising in semiconductor processes. Our exhaust gas treatment unit efficiently processes harmful gases generated from semiconductor manufacturing equipment such as VCD and etching devices, reducing the load on dry vacuum pumps. As a result, it achieves reduced maintenance frequency and cost savings, contributing to stable equipment operation and improved production efficiency.
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basic information
Types of gases that can be handled: - Inert gases: He, SF₆, CO₂, CF₄, C₂F₆, C₄H₈, CH₃F, etc. - Flammable gases: SiH₄, Si₂H₆, B₂H₆, PH₃, SiH₂Cl₂, CH₃, C₂H₂, CO, etc.
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For more details, please refer to the catalog or feel free to contact us.
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Arctos Precision Co., Ltd. aims to become a global company and will propose new value that contributes to society in response to customer demand, trust, and expectations for further growth.