High Flow Type Inline Ultra High Purity Gas Purifier "FPH-300"
Ultra-high purity gas purifier "FPH-300"
Inline ultra-high purity gas purifier Fine Purifier "High flow type of 300NL/min"
The "Fine Purifier FPH-300" purifies various impurities in hydrogen gas (CO, CO2, O2, H2O) to below 1 ppb. The flow rate range is up to 300 NL/min. It comes standard with a 0.003 µm particle filter. It can be reused by regeneration. 【Features】 ■ Thorough cost management ■ Delivery possible within 3 weeks (domestically manufactured) ■ Long-term use at low cost ■ Regenerable ■ Inline type *For more details, please refer to the PDF document or feel free to contact us.
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basic information
【Product Specifications (Partial)】 ■Applicable Gas: H2 ■Impurities to be Removed: CO, CO2, O2, H2O ■Raw Gas Purity: Equivalent to 5N gas cylinder or higher ■Impurity Concentration of Purified Gas for Each Target Component: Less than 1 ppb ■Operating Pressure: 0.2 MPaG or higher, 0.97 MPaG or lower ■Maximum Pressure: 0.97 MPaG ■Maximum Flow Rate: 300 NL/min ■Operating Temperature: Room temperature (both environment and gas temperature) ■Lifespan / Purification Volume: 6,000 Nm3 ■Material (Casing): SUS316L EP ■Dimensions: Φ76.3 mm × L667.6 mm ■Connection Diameter: 1/2 inch VCR fitting (male) *These are provisional reference values and may be subject to change. *For more details, please refer to the PDF document or feel free to contact us.
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Applications/Examples of results
【Applications】 ■ Carrier gas for analytical instruments, zero gas ■ Semiconductor manufacturing equipment, CVD equipment ■ Atmosphere gas and purge gas requiring high purity ■ Shielding gas for welding *For more details, please refer to the PDF document or feel free to contact us.
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Company information
Osaka Gas Liquid Co., Ltd. was established in 1991 as a wholly-owned subsidiary of Osaka Gas. The company focuses on the manufacturing and sales of industrial gases and dry ice utilizing the cold energy from liquefied natural gas (LNG) imported by Osaka Gas, as well as developing low-temperature grinding using liquefied nitrogen and related industrial gas technologies in collaboration with group companies.