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  1. Home
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  5. Processing Contract
  6. Graphite trays for high-temperature furnaces and vacuum furnaces for semiconductors.

Graphite trays for high-temperature furnaces and vacuum furnaces for semiconductors.

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last updated:Jan 28, 2026

東京炭素工業
東京炭素工業
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Graphite trays supporting wafer transport in semiconductor manufacturing.

In the semiconductor industry, accurate transport under high-temperature conditions is essential to maintain the quality of wafers. Particularly during the thermal processing stage, it is crucial to heat the wafers uniformly and prevent distortion. The use of inappropriate trays can lead to wafer damage or performance degradation. Our graphite trays utilize high-quality graphite materials that excel in heat resistance and chemical resistance, ensuring the safe transport of wafers. 【Usage Scenarios】 - Wafer transport in high-temperature furnaces - Wafer transport in vacuum furnaces - Wafer holding during thermal processing 【Benefits of Implementation】 - Reduced risk of wafer damage - Increased efficiency in thermal processing - Improved product quality

    Processing Contract
事例1.jpg

Graphite trays for high-temperature furnaces and vacuum furnaces for semiconductors.

事例1.jpg
事例1.jpg
  • Related Link - https://tokyotanso.com/product/
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【Features】 - Excellent properties against heat - Resistant to oxidation - Conducts electricity (conductive) - Lightweight and easy to process - Chemical resistance 【Our Strengths】 Our company has been engaged in carbon and graphite processing for 78 years. We stock a wide variety of materials and can accommodate made-to-order production from a single piece based on customer drawings.

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catalog(7)

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List of Graphite Standard Products

List of Graphite Standard Products

PRODUCT
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Introduction to Carbon Graphite

Introduction to Carbon Graphite

TECHNICAL
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Types of carbon materials handled

Types of carbon materials handled

OTHER
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C/C composite (carbon fiber reinforced carbon) products

C/C composite (carbon fiber reinforced carbon) products

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CFRP (Carbon Fiber Reinforced Plastic) products

CFRP (Carbon Fiber Reinforced Plastic) products

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Battery material production technology from used tires "Tire Battery (R)"

Battery material production technology from used tires "Tire Battery (R)"

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Artificial graphite "carbon material/graphite material"

Artificial graphite "carbon material/graphite material"

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Company information

東京炭素工業

東京炭素工業

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Our company will celebrate its 77th anniversary in 2024. For a long time, even before the advent of high-performance machines such as machining centers and NC lathes, we have been a leading company in the industry specializing in the processing of carbon and graphite. - We always keep a diverse range of materials in stock, sourced from various material manufacturers. - Since we operate on a made-to-order basis, we can accept orders for both mass production and single pieces. - You can provide drawings in handwritten form, so please feel free to contact us even just for a quote.

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