Thermal mass flow meter specialized for monitoring non-corrosive and non-combustible gases.
In the semiconductor manufacturing industry, precise flow management of specialty gases is essential for the stable supply of high-quality products. Particularly in processes that use high-purity gases, even minor flow fluctuations can significantly impact product quality. Malfunctions in flow meters pose risks of halting manufacturing processes or producing defective products. The EE776 accurately monitors the flow of non-corrosive and non-flammable gases, supporting a stable manufacturing process. 【Application Scenarios】 - Flow monitoring of specialty gases in semiconductor manufacturing processes - Gas flow measurement in cleanroom environments - Anomaly detection in gas supply systems 【Benefits of Implementation】 - Optimizes gas usage and contributes to cost reduction - Stabilizes manufacturing processes and improves yield - Enhances product quality
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【Features】 - Backflow prevention function - Sealed O-ring - Probe positioning - Convection error cutoff function 【Our Strengths】 Leveraging the know-how cultivated as a domestic dew point meter manufacturer, we provide optimal product selection tailored to customer needs and support after installation. We also offer calibration, inspection, and repair services, ensuring that you can use our products with confidence.
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Applications/Examples of results
● Compressed air ● Nitrogen ● CO₂ ● Other non-corrosive gases ● Non-flammable gases Monitoring, etc.
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We introduce various measuring instruments and devices related to moisture management, including the domestic capacitive dew point meter TK-100 series, mirror-type dew point meters, oxygen concentration meters, humidifiers, and moisture meters for corrosive gases. By organically combining these, as well as through piping, line creation, and unitization, we provide custom-made products and respond quickly to complex issues.
