Oil-lubricated spherical bearing type turbo molecular pump
**Features of the Compound Molecular Pump** - Wide Range Exhaust It supports a wide range of exhaust from low to ultra-high vacuum. - High Flow Exhaust It can handle a large volume of gas. - Excellent Durability It has a structure that is resistant to sudden atmospheric introduction. - Long-term Usability It can be used for an extended period with appropriate overhauling. For other functions and features, please refer to the catalog or contact us.
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basic information
【Product Features】 - Standard type for clean processes and chemical type resistant to corrosive gas exhaust - One of the largest composite molecular pumps in the world - Structure resistant to sudden atmospheric intrusion - Strong against external impacts For other functions and features, please refer to the catalog or contact us.
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Applications/Examples of results
Semiconductor manufacturing Electron gun exhaust, ion source exhaust FPD manufacturing Surface treatment, surface modification Manufacturing of various electronic components Tube manufacturing, optical component manufacturing Accelerators, radiation facilities, nuclear fusion research Heat treatment Research and development For further details, please contact us.
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Company information
We provide our customers with reliable products that can be used with peace of mind, satisfaction, and for a long time! Osaka Vacuum is committed to offering vacuum equipment that satisfies our customers by setting four major goals: "Customization," "Advanced Safety Measures," "Future-Oriented," and "Customer Support System," and we are dedicated to realizing and further deepening these goals.
