Achieving liquid application in semiconductor manufacturing with high-pressure, pulsation-free liquid delivery!
In the semiconductor manufacturing industry, precise application of chemicals is essential for the stable production of high-quality products. Particularly as miniaturization advances, the uniform supply and precise application of chemicals become critical factors that influence yield. Pulsating fluid delivery can cause uneven application and variations in liquid quality, potentially compromising product quality. The High-Pressure Smooth Flow Pump (HPL) enables high-pressure fluid delivery of up to 50 MPa and achieves non-pulsating fluid delivery, addressing the challenges of chemical application in semiconductor manufacturing. 【Application Scenarios】 - Photoresist application - Developer application - CMP slurry supply 【Benefits of Implementation】 - Improved application uniformity - Increased yield - Stabilization of liquid quality - Reduction in total cost of ownership (TCO)
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**Features** - No liquid leakage - No foreign matter contamination - Strong against slurries - Does not break during dry running - Pulsation-free liquid delivery **Our Strengths** Takumina Co., Ltd. contributes to solving customer challenges as a leading company in precision pumps. Through pump technology cultivated over more than 67 years of history and the provision of diverse fluid solutions, we meet the needs of our customers in semiconductor manufacturing. We propose optimal systems from research and development to manufacturing processes. We also accept inquiries about rental machines and actual liquid testing.
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Applications/Examples of results
- Jet mill - High-pressure homogenizer - Hydrogen production - Flow synthesis - Spray drying - Separation and purification
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Company information
Takumina Co., Ltd. is a leading company in precision pumps, welcoming all challenges as a "fluid solutions" provider. With a history of over 67 years since its founding, it is a long-established manufacturer that was the first in Japan to start producing powered metering pumps. Before the widespread adoption of water supply systems, it began manufacturing and selling suction-type chlorine disinfection machines, and the difficult challenges faced by customers have shaped Takumina's "pump technology" over the years. Currently, our pumps continue to be chosen in various manufacturing processes that require severe precision, including electronic materials and pharmaceuticals. Our smooth flow pumps, which provide high-precision liquid delivery with a continuous, pulsation-free flow despite being diaphragm-type, are strong against slurries, contamination-free, and do not alter liquid quality. We offer fluid solutions used in various manufacturing, transfer, supply, and injection processes, starting with the water treatment field. Takumina is committed to understanding the characteristics of liquids and the various conditions of processes to propose optimal transfer systems. We provide suggestions from research and development to manufacturing processes. We also accept inquiries about rental machines and actual liquid tests. If you have any difficulties in choosing pumps or fluid transfer, please feel free to contact us.
![[★Demo unit available for loan] Airflow visualization set](https://image.mono.ipros.com/public/product/image/5e2/2000716136/IPROS26507171211429380701.jpeg?w=280&h=280)