[Predictive Maintenance Case] Abnormal Detection of Turbo Molecular Pump

Preventing pump failures in advance through monitoring focused on abnormal sounds! A case of reducing maintenance costs.

This is an introduction to a case where a "VD-unit" was introduced to the turbo molecular pump of a semiconductor manufacturing device to establish a system for detecting bearing abnormalities (unusual noises). The challenge was that it was not possible to accurately grasp the lifespan or signs of failure of the pump, leading to excessive maintenance and high maintenance costs. Maintenance personnel recognized that the unusual noises generated by pumps with deteriorated bearings become louder. The "VD-unit" has established a system that quantitatively detects these unusual noises as vibration values. [Case Overview] ■ Request: To prevent sudden failures of turbo molecular pumps and reduce maintenance costs ■ VD-unit Settings - Filter: 1kHz to 10kHz - Measurement Mode: Acceleration - Calculation Mode: RMS, CF ■ Normal State: 0.7m/s² (RMS setting) ■ Unusual Noise Occurrence: 4.5m/s² (RMS setting) *For more details, please download the PDF or feel free to contact us.

Vibration Monitoring