Fluid control of EUV resist without waste - Syringe pump Excalibur

Tekan's syringe pump, known for its proven track record in the development of coating equipment requiring high precision and accuracy. Compact yet designed to be extremely robust.

Fluid control syringe pump that does not waste expensive EUV resist. It is optimal for resist droplets under spin coaters and slit coaters. Additionally, it achieves high reproducibility (CV value: 0.05%) at a low cost. It allows for easy control of flow rate from the start, independent of unstable external pressure and flow controllers. Volume range for a single delivery: 2nl to 5ml (*) Volume adjustment unit: minimum 2nl (*) Flow rate range: 5μl/min to 250ml/min (83nl/sec to 4.16ml/sec) Flow rate adjustment unit: 208nl/min (*) *Dependent on the capacity of the installed syringe. Example: When a 2.5ml syringe is installed Volume adjustment unit: minimum 104nl Flow rate range: 250μl/min to 125ml/min (4.1μl/sec to 2.08ml/sec) Flow rate adjustment unit: 6.24ml/min (104nl/sec) Features: Equipped with management functions for discharge volume and flow rate via an encoder, and a report function to notify errors during abnormal conditions. Easy operation linkage via I/O terminals. It has a working volume memory function. Built robustly to reduce service costs for embedded devices and contributes to lowering the failure occurrence rate of the equipment.

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