Development of superior coating equipment: Syringe Pump Excalibur

Tekan's syringe pump, known for its proven track record in the development of coating devices that require high precision and accuracy. It is compact yet designed to be extremely robust.

Fluid control syringe pump that does not waste expensive EUV resist. It is optimal for resist droplets under spin coaters and slit coaters. Additionally, it achieves high reproducibility (CV value: 0.05%) while being cost-effective. It allows for easy control of flow rate from the start with a delivery unit that does not depend on unstable external pressure and flow controllers. Volume range per delivery: 2nl to 5ml (*) Volume adjustment unit: minimum 2nl (*) Flow rate range: 5μl/min to 250ml/min (83nl/sec to 4.16ml/sec) Flow rate adjustment unit: 208nl/min (*) * Depends on the capacity of the installed syringe. Example: When using a 2.5ml syringe Volume adjustment unit: minimum 104nl Flow rate range: 250μl/min to 125ml/min (4.1μl/sec to 2.08ml/sec) Flow rate adjustment unit: 6.24ml/min (104nl/sec) Features: Equipped with management functions for discharge volume and flow rate via an encoder, and a report function to notify errors during abnormal conditions. Easy linkage operation with I/O terminals. Has a working volume memory function. Robust design reduces service costs for embedded devices and contributes to a lower failure rate of the equipment.

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