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  6. Ceramic pin spring plunger (contamination prevention component)

Ceramic pin spring plunger (contamination prevention component)

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last updated:Mar 30, 2026

タカイコーポレーション
タカイコーポレーション
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Achieving "clean contact" required by semiconductors: Ceramic pin spring plunger (contamination prevention component)

In semiconductor manufacturing, as miniaturization and high integration progress, even a small amount of metal powder or wear powder can lead to contamination, which directly affects yield. Our ceramic pin spring plungers are specially designed components that achieve clean contact through non-metallic materials, contributing to the improvement of quality and reliability in semiconductor processes. Reasons why they are optimal for semiconductor processes: Zero metal powder - The definitive solution for contamination prevention. The generation of wear powder, which could not be avoided with conventional metal pins, is significantly reduced through ceramicization. High wear resistance and long-term stable operation. Due to the high hardness of ceramics, wear and deformation are almost nonexistent, maintaining the shape accuracy of the contact parts over an extended period. Dimension stability even in high-temperature processes. With low thermal expansion, performance is maintained even in high-temperature environments. Safety design through insulation. Being completely non-conductive prevents shorts and electrical issues. Cleanroom compatible with high purity and low outgassing. Impurities are extremely low, and outgassing is nearly zero.

    Other machine elements
セラミックピンプランジャ.jpeg

Ceramic pin spring plunger (contamination prevention component)

セラミックピンプランジャ.jpeg
セラミックピンプランジャ.jpeg

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Change the pin material of the spring plunger to ceramic.

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Applications/Examples of results

Wafer transport device Cleaning device (wet process) Inspection device / measurement device Vacuum device / plasma device Front-end / back-end equipment

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タカイコーポレーション

タカイコーポレーション

Machine elements and parts

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Our company manufactures and sells spring plungers, ball rollers, and special screws. We have been manufacturing spring plungers for 30 years. We will continue to strive for quality improvement to meet our customers' expectations even more. We also engage in the design and development of our products tailored to customer needs and are actively working on new businesses, such as the manufacturing and sales of CFRP bolts. 【Production Items】 Ball plungers Spring plungers Conveyor ball rollers (ball transfers) Simple slide guides for jigs Special screws Mold bolts Carbon bolts Tubes and valves for semiconductor manufacturing equipment (subsidiary)

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