[Information] Introduction of valves used in equipment and facilities at semiconductor manufacturing plants.

From film formation to etching and cleaning! Introducing the valve conditions and product examples required for each process.

This is a technical document summarizing the valves used for each piece of equipment and facility in semiconductor manufacturing plants. It includes examples of our products and the conditions required for valves in various processes, from process equipment such as deposition systems, etching systems, and cleaning systems, to facilities like cylinder cabinets, gas purification systems, liquid supply systems, VMB, exhaust systems, and utility piping. Please feel free to use this as a reference for product selection. [Contents (partial)] ■ Products used in deposition systems (single wafer/batch/vertical) ■ The role of etching systems and the valves used ■ The role of cleaning systems and the valves used ■ Valves used in equipment and systems supporting the deposition process *For more details, please download the PDF or feel free to contact us.

valveValves and fittings