Fusion of vacuum technology and FA (Factory Automation) core technologies! Support from design and manufacturing to assistance.
Design and production of overlay devices, sealant application devices, and nitrogen replacement containers, special type GB.
We design and manufacture deposition equipment such as vapor deposition devices, sputtering devices, and CVD devices for semiconductors and various industries. We have a system in place that allows us to provide total services, including on-site delivery and setup after the completion of the equipment, as well as maintenance after it is operational. We also design and manufacture units such as exhaust sets. Additionally, we have extensive experience in designing various experimental support equipment and applying vacuum design, and we can assist from the specification consideration stage.
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【Products】 Deposition film formation device - Formation of various metal/organic deposition films, evaluation of physical properties, thin film formation, film thickness strength (reinforcement), temperature control - Doping, material research and evaluation 【Examples of Production】 - Design and manufacture of experimental devices (custom specifications), modification design and manufacture of experimental devices (custom specifications) - Inert gas environment devices, vacuum drying devices (heating/cooling) - Equipment compatible with glove boxes (high purity atmosphere chamber + vacuum chamber) - Design and manufacture of various purification machines 【Various FA-related Devices】 - Movable devices within vacuum chambers, atmosphere/vacuum/glove box related devices - Design and manufacture of organic EL, FPD, solar cells, and other equipment 【Manufacturing Based on Provided Drawings】 - Parts processing, purchasing, assembly, adjustment, inspection, installation adjustment - Assembly, adjustment, inspection, and installation adjustment for mass production equipment 【Semiconductor Process Applied Products】 - Experimental deposition devices, experimental devices for organic EL deposition substrates, sputtering devices (experimental equipment/production equipment), CVD devices (experimental equipment/production equipment), film formation devices (experimental equipment/production equipment) 【Design and Manufacture of Vacuum-Compatible Products】 - Design and manufacture of various piping, various flange application products, and application parts for vacuum chambers 【On-site Construction】 - Piping work within factories, utility work for devices
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Through the assembly work of various vacuum devices such as sputtering, deposition, organic EL, solar cells, metalizing, CVD, and freeze-drying, there are many skilled workers with extensive knowledge and experience related to vacuum technology. Gas piping is manufactured in a clean welding room installed within the clean room. In addition to the on-site installation of secondary connection piping at the installation site, we also undertake the construction of ladder installations for electrical wiring.