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  6. Long Scale Stage FS-3000/2000 Series

Long Scale Stage FS-3000/2000 Series

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FS-3000 / FS-2000 Series

last updated:Jun 03, 2019

シグマ光機
シグマ光機
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"Precision positioning device" - A stage with long stroke, high resolution, excellent positioning repeatability, and position holding capability after positioning!

This is a high-resolution long-stroke positioning stage equipped with an optical linear scale, which reduces detection errors. It has a stroke of "200mm," "300mm," or "400mm" with a resolution of "50nm" (*1) or "100nm" (*2). Thanks to our in-house developed linear scale and unique feedback control circuit, it offers high resolution, excellent positioning repeatability, and position holding capability after positioning. (*1) Combination with feedback stage controller FC-401 (*2) Combination with feedback stage controller FC-101

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26.jpg

Long Scale Stage FS-3000/2000 Series

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26.jpg
  • Related Link - https://www.global-optosigma.com/jp/

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basic information

This is a stage characterized by a long stroke. It can achieve control with a resolution of 50nm or 100nm in combination with the feedback stage controllers FC-401 or FC-101. Additionally, high-precision repeat positioning is possible through full closed-loop control. ■ For more details, please request documentation or download the catalog ■

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Applications/Examples of results

The feedback stage system has been used in various fields in recent years. The typical fields of use include information and communication, optics, semiconductors, and biotechnology.

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FS-3150X Catalog

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Submicron Feedback Stage System Catalog

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シグマ光機

シグマ光機

Testing, Analysis and Measurement

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The Sigma Koki Group, under the global brand "OptoSigma," is committed to its mission as a "light solution company" in both domestic and international markets, carrying the spirit of "gratitude," "challenge," and "creation." We will continue to actively expand our business and strive for sustainable growth as one united company. We sincerely ask for your understanding and support for the Sigma Koki Group as we pursue true "manufacturing" in the future.

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