8-inch wafer compatible type
This is a CV/IV measurement system using a mercury probe method that excels in reproducibility and safety. It can measure the characteristics of various types of wafers, including Si, compounds, SOI, SiC, and bulk wafers. Users can specify up to 49 measurement sites, and the system allows for mapping measurements of C-V, I-V characteristics, TDDB, Vbd, Qbd oxide breakdown evaluation, Dit, doping concentration, oxide film thickness, Low-k, High-k, and more.
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basic information
【Features】 ○ C-V and I-V measurement device (Type A) using a two-point probing method ○ Enables three-point probing, allowing this composite measurement to realize a pseudo-MOSFET state, making it possible to measure interface trap density of the insulating layer without removing the Top-Si layer ○ Compatible with wafer sizes from 1 to 8 inches, capable of mapping measurements for up to 49 sites ○ Various evaluations can be performed, including TDDB, interface trap density, pinhole density, and carrier concentration ● For more details, please contact us.
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Applications/Examples of results
Wafer inspection
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Company information
Yamato Corporation's Measurement Equipment Division manufactures and sells inspection, analysis, and evaluation devices necessary for research and development and production in the semiconductor, organic EL, liquid crystal, solar cell, and fuel cell industries. In particular, we specialize in developing devices used in research and development departments that require measurements under special environmental conditions, and we have numerous achievements in delivering to cutting-edge fields. Additionally, we are currently challenging ourselves to integrate conventional probing technology into applied technology fields, aiming to establish a system that can support inspection, analysis, and evaluation in all areas, including applied technologies centered around semiconductors in the future. 【Head Office and Branch Locations】 ◆ Kobe Head Office 〒650-0047 1-4-6 Minamimachi, Port Island, Chuo Ward, Kobe City TEL (078) 304-5178 (DI) FAX (078) 304-6087 ◆ Tokyo Branch 〒107-0062 1-15-9 Minami Aoyama, Minato Ward, Tokyo TEL (03) 3403-0771 FAX (03) 3403-0813 ◆ Nagoya Branch 〒460-0002 2-19-25 Marunouchi, Naka Ward, Nagoya City YH Marunouchi Building TEL (052) 212-4932 FAX (052) 212-4935