12-inch wafer compatible type
This is a CV/IV measurement system using a mercury probe method that excels in reproducibility and safety. It can measure the characteristics of various types of wafers, including Si, compounds, SOI, SiC, and bulk wafers. Users can specify up to 49 measurement sites, enabling mapping measurements of C-V, I-V characteristics, TDDB, Vbd, Qbd oxide breakdown evaluation, Dit, doping concentration, oxide film thickness, Low-k, High-k, and more.
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basic information
【Features】 ○ Model compatible with 12-inch wafers for CVmap92A ○ C-V and I-V measurement device using a two-point probing method (Type A) ○ Allows probing from three points (Type B) ○ Compatible with wafer sizes from 1 to 12 inches ○ Capable of measuring the entire wafer at arbitrary sites ○ Contour and 3D maps can also be created ● For more details, please contact us.
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Applications/Examples of results
Measurement using the mercury probe method.
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Company information
Yamato Corporation's Measurement Equipment Division manufactures and sells inspection, analysis, and evaluation devices necessary for research and development and production in the semiconductor, organic EL, liquid crystal, solar cell, and fuel cell industries. In particular, we specialize in developing devices used in research and development departments that require measurements under special environmental conditions, and we have numerous achievements in delivering to cutting-edge fields. Additionally, we are currently challenging ourselves to integrate conventional probing technology into applied technology fields, aiming to establish a system that can support inspection, analysis, and evaluation in all areas, including applied technologies centered around semiconductors in the future. 【Head Office and Branch Locations】 ◆ Kobe Head Office 〒650-0047 1-4-6 Minamimachi, Port Island, Chuo Ward, Kobe City TEL (078) 304-5178 (DI) FAX (078) 304-6087 ◆ Tokyo Branch 〒107-0062 1-15-9 Minami Aoyama, Minato Ward, Tokyo TEL (03) 3403-0771 FAX (03) 3403-0813 ◆ Nagoya Branch 〒460-0002 2-19-25 Marunouchi, Naka Ward, Nagoya City YH Marunouchi Building TEL (052) 212-4932 FAX (052) 212-4935
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