To accommodate various user purposes and uses, a hollow structure XYZ mechanism has been adopted in the main unit!
The "KSM-114-50Z/150Z" is a semi-manipulator that offers flexibility in the operation of the X and Y axes and can be used in ultra-high vacuum environments. The Z axis is equipped with a scale on the side, allowing for precise movements and fine adjustments. By using the tilt screw on the front of the main body, it can also function as a simple tilt mechanism with a maximum tilt of 2°. Movement and positioning operations of samples, etc., can be performed from the atmospheric side in ultra-high vacuum environments, such as in deposition devices and MBE systems. 【Features】 ■ Usable in ultra-high vacuum environments ■ Micrometer heads are used for the drive components of the X and Y axes ■ Movement per rotation is 0.5mm each ■ If the connecting flange is of the ICF-152 type, field-through and other connections can be made via the six introduction ports (ICF-34FT connection) installed on the top of the connecting flange. *For more details, please refer to the PDF document or feel free to contact us.
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【Specifications (Excerpt)】 <KSM-114-50Z> ■Travel Distance ・Z-axis: 0 to 50mm ・X-axis: ±12.5mm ・Y-axis: ±12.5mm <KSM-114-150Z> ■Travel Distance ・Z-axis: 0 to 150mm ・X-axis: ±12.5mm ・Y-axis: ±12.5mm <Common Specifications> ■Allowable Leak Rate: ≦1.33×10-11Pa·m3/sec ■Allowable Heating Temperature: ≦200℃ ■Movement Accuracy: XY axis 0.01mm or less ■Positioning Scale: XY axis 0.001mm or less ■Upper Connection Flange: ICF-70FT ■Lower Connection Flange: ICF-114FH ■Vacuum Seal Operating Part: Welded Bellows SUS-316 ■Weight: 9.0kg (50Z), 9.0kg (150Z) *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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The history of Kitano Seiki is also a trajectory of continuous contribution to cutting-edge research fields through the provision of precision instruments for research and development. In November 1958, we were established as a company specializing in the design, manufacturing, and sales of precision instruments. Since then, we have developed and manufactured experimental equipment aimed at research institutes in universities and government agencies, as well as basic research laboratories in private companies, earning high praise for our excellent quality and reliability. In particular, in recent years, we have been at the forefront of ultra-high vacuum and ultra-low temperature technologies, which are essential in industrial fields such as new materials, nanotechnology, flat panel displays, high-temperature superconductivity, solar cells, nuclear power, and space development. We have accumulated abundant technology and know-how in creating experimental environments and have linked this to the development and provision of equipment that condenses advanced performance and functionality. At Kitano Seiki, we always work closely with researchers, our users, to design and develop equipment that accurately supports research and development objectives. With a consistent system from parts manufacturing to various processing, assembly, inspection and testing, equipment setup, and after-sales support, we provide high-quality products and a conducive experimental environment for quality research and development.