Case Study of Improvement in 3D Atom Probe Equipment
◆◇◆Background◆◇◆ In the three-dimensional atom probe (3D-AP) device, field evaporation from the tip (a needle-like sample used to apply a high electric field to the sample surface in atom probe analysis) is now performed using laser irradiation instead of the conventional high-pressure application. Therefore, it is necessary to locally irradiate the laser at the tip apex. However, due to the vibrations from the refrigerator used to stabilize the FIM image (atoms), it has become difficult to determine the irradiation position of the laser on the tip apex.
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◆◇◆Countermeasures◆◇◆ Due to the direct attachment of the tip holder to the tip of the refrigerating machine for cooling, the mechanism inevitably picked up vibrations. Therefore, this time, to eliminate vibrations, we separated the refrigerating machine and the tip, improving the structure to avoid picking up vibrations from the refrigerating machine. ◆◇◆Configuration◆◇◆ ◆Fixing Method Fixed using studs from a flange independent of the refrigerating machine. ◆Cooling Method Cooling of the jig for fixing the tip holder is performed using a copper plate from the tip of the refrigerating machine. The cooling of the tip holder is carried out using a blade (Ag) from the tip of the refrigerating machine. *Changed to cool only the minimum components. ◆◇◆Results◆◇◆ As a result of this improvement, the tip end is now in a state close to being free of vibrations, making it easier to locally irradiate with a laser. Additionally, by minimizing the cooling area, an increase in cooling capacity has been achieved.
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The history of Kitano Seiki is also a trajectory of continuous contribution to cutting-edge research fields through the provision of precision instruments for research and development. In November 1958, we were established as a company specializing in the design, manufacturing, and sales of precision instruments. Since then, we have developed and manufactured experimental equipment aimed at research institutes in universities and government agencies, as well as basic research laboratories in private companies, earning high praise for our excellent quality and reliability. In particular, in recent years, we have been at the forefront of ultra-high vacuum and ultra-low temperature technologies, which are essential in industrial fields such as new materials, nanotechnology, flat panel displays, high-temperature superconductivity, solar cells, nuclear power, and space development. We have accumulated abundant technology and know-how in creating experimental environments and have linked this to the development and provision of equipment that condenses advanced performance and functionality. At Kitano Seiki, we always work closely with researchers, our users, to design and develop equipment that accurately supports research and development objectives. With a consistent system from parts manufacturing to various processing, assembly, inspection and testing, equipment setup, and after-sales support, we provide high-quality products and a conducive experimental environment for quality research and development.