Systonavi Co., Ltd. Service Overview: Patterning Processing, Research and Development, Experiments, Prototyping, Outsourced Mass Production.
Assist Navi's "Pata Turning Process"
This is an introduction to Assist Navi's "Patterning Processing" services, a specialized company for research and development, prototyping, experimentation, and outsourced mass production. 【Features】 ■ Large-wafer Foundry We assist in processing for each process on 8 and 12-inch device lines. <Representative processing equipment> - Sputtering, CVD - KrF/ArF lithography, ion implantation, CMP, etc. ■ MEMS-wafer Foundry We assist in processing for each process on MEMS device lines. <Representative processing equipment> - Sputtering, CVD - KrF/ArF lithography, ion implantation, CMP, etc. ■ Small-wafer Foundry We assist in processing for each process on device prototyping lines of 6 inches or smaller. <Representative processing equipment> - Sputtering, CVD - KrF/ArF lithography, ion implantation, CMP, etc. *For other functions and details, please download the catalog or contact us.
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basic information
This is an introduction to the "Patterning Processing" services offered by Assist Navi, a company specializing in research and development, prototyping, experimentation, and outsourced mass production. 【Features】 ■ Large-wafer Foundry We assist in processing for each process on 8 and 12-inch device lines. <Representative processing equipment> - Sputtering, CVD - KrF/ArF lithography, ion implantation, CMP, etc. ■ MEMS-wafer Foundry We assist in processing for each process on MEMS device lines. <Representative processing equipment> - Sputtering, CVD - KrF/ArF lithography, ion implantation, CMP, etc. ■ Small-wafer Foundry We assist in processing for each process on device prototyping lines of 6 inches or smaller. <Representative processing equipment> - Sputtering, CVD - KrF/ArF lithography, ion implantation, CMP, etc. *For other functions and details, please download the catalog or contact us.
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Applications/Examples of results
- Large-wafer Foundry Fine TEG patterns (L&S, C&H), Cu damascene process patterns, etc. - MEMS-wafer Foundry Fine TEG patterns (L&S, C&H), Cu damascene process patterns, etc. - Small-wafer Foundry Fine TEG patterns (L&S, C&H), Cu damascene process patterns, etc.
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Company information
Assist Navi prioritizes customer requests above all, striving to provide satisfactory products and services with a motto of speedy response and a spirit of challenge. We aim to maintain a flexible system and innovative thinking to adapt to market changes at all times.