Vacuum transport unit for multi-vacuum processes
Adoption of a hexagonal center chamber Vacuum transport unit for multi-vacuum processes 【Features】 ○ Incorporates a gate valve within the center chamber, achieving space-saving design ○ Main pump (turbo molecular pump) of the center chamber is mounted on the upper lid, ensuring high maintainability ○ Equipped with a uniquely developed vacuum transport robot ○ Each chamber is equipped with an independent vacuum exhaust system (However, the center chamber and the load lock chamber share a system) ○ Equipped with a set load lock chamber capable of accommodating 13 φ300 Si wafers ● For other functions and details, please download the catalog.
Inquire About This Product
basic information
Adoption of a hexagonal center chamber Vacuum transport unit for multi-vacuum processes 【Features】 ○ Integration of a gate valve within the center chamber, achieving space-saving design ○ Main pump (turbo molecular pump) of the center chamber mounted on the upper lid, ensuring high maintainability ○ Equipped with a uniquely developed vacuum transport robot ○ Independent vacuum exhaust systems for each chamber (However, the center chamber and the load lock chamber share a system) ○ Set load lock chamber capable of accommodating 13 φ300 Si wafers ● For other functions and details, please download the catalog.
Price information
-
Delivery Time
Applications/Examples of results
For more details, please contact us.
catalog（1）
Download All Catalogs
Company information
The name of the new organization, Maple Co., Ltd., which aims to achieve development through a new stage in the field of precision processing and assembly, embodies the fundamental policy of "organizations are people" that has been inherited from the past, as well as the concept of "people think, people create." Make People. "Creating people" along with "people create." This attitude embedded in our company name symbolizes the way we aspire to shape our organization and business in the future.