Lampard Unit
Rapid heating and high-precision temperature distribution achieved with the lamp R unit. 【Features】 ○ Utilizes high-output infrared lamp heaters in a circular shape to heat the substrate from both above and below, achieving rapid heating and high-precision temperature distribution. ○ Employs a cooling reflective plate with a special surface treatment on the inner surface of the chamber, enabling excellent process reproducibility and rapid cooling. ○ Processing substrate: φ300mm ○ Maximum operating temperature: 1000±10℃ ● For other functions and details, please download the catalog.
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Rapid heating and high-precision temperature distribution achieved with the lamp R unit. 【Features】 ○ Utilizes a high-output infrared lamp heater in a circular shape to heat the substrate from both above and below, achieving rapid heating and high-precision temperature distribution. ○ Employs a cooling reflective plate with a special surface treatment on the inner surface of the chamber, enabling excellent process reproducibility and rapid cooling. ○ Processing substrate: φ300mm ○ Maximum operating temperature: 1000±10℃ ● For other functions and details, please download the catalog.
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The name of the new organization, Maple Co., Ltd., which aims to achieve development through a new stage in the field of precision processing and assembly, embodies the fundamental policy of "organizations are people" that has been inherited from the past, as well as the concept of "people think, people create." Make People. "Creating people" along with "people create." This attitude embedded in our company name symbolizes the way we aspire to shape our organization and business in the future.