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  6. Vacuum deposition EB source and power supply NEB-05S type NEB-05W type

Vacuum deposition EB source and power supply NEB-05S type NEB-05W type

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NEB-05S model NEB-05W model

last updated:Jul 14, 2022

日新技研
日新技研
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It is a power supply with a super compact size that requires little installation space!

【Vacuum Deposition EB Source and Power Supply NEB-05S Type NEB-05W Type】 The NEB-05 series power supply is ultra-compact and requires minimal installation space. The NEB-05S type power supply is designed for a single electron beam source, while the NEB-05W type power supply is designed for two electron beam sources. 〈Features〉 - Rate control is possible with the external emission control circuit! - Standard equipped with monitoring output circuits for acceleration voltage, emission current, and filament current! - External X and Y scan control and external X and Y position control are possible! - Standard equipped with a discharge suppression device! *For more details, please contact us or download the catalog.

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Vacuum deposition EB source and power supply NEB-05S type NEB-05W type

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【Specifications】 Maximum beam output: 5kW Power supply: 3Φ 200V ±10% 8kVA Acceleration voltage: -4kV to -6kV Ripple rate: 5% or less Emission current: 0 to 800mA Beam position: ±15mm (X/Y) Beam scan: ±15mm (X/Y) optional ±20mm Beam scanning frequency: X=50Hz, Y=500Hz External control signals: Approximately 15 items Weight: 150kg ● For other functions and details, please download the catalog.

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EB source and power supply for vacuum deposition NEB-05S type NEB-05W type

EB source and power supply for vacuum deposition NEB-05S type NEB-05W type

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日新技研

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Testing, Analysis and Measurement

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