Z Stage LMT Series
Installation of various components Hollow Z-stage with direct movement adjustment from the atmospheric side 【Features】 ○ Bakeable due to all-metal seals ○ Compatible with various ultra-high vacuum devices such as MBE systems due to Conflat flange specifications ○ Supports φ34CF to φ114CF ○ Facilitates easy movement into the vacuum by combining with various sensors and deposition sources ● For other functions and details, please download the catalog.
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Installation of various components Hollow Z stage with direct movement adjustment from the atmospheric side 【Features】 ○ Bakeable due to all-metal seals ○ Compatible with various ultra-high vacuum devices such as MBE systems due to Conflat flange specifications ○ Supports φ34CF to φ114CF ○ Allows easy movement into the vacuum by combining with various sensors and deposition sources ● For other functions and details, please download the catalog.
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Company information
In 1972, the first president, Horita, established Taisei Sangyo Co., Ltd. using the entrance of his home as a workplace, and since then, we have been dedicated to technology development and research. Initially, we were involved in the development of devices such as the Polack counter for the Meteorological Research Institute, starting our work in the field of atmospheric science. Subsequently, we expanded our work into the vacuum world by starting maintenance services for leak detectors. Around the 10th anniversary of our founding, work in ultra-high vacuum began to increase, and by the 15th anniversary, we were able to manufacture small devices. Currently, our scope of work has significantly expanded, not only covering ultra-high vacuum, MBE, CVD, ECR, and RF radical sources, but also advancing the development of functional components utilizing various plasmas, ions, or electrons. In the future, we aim to become a small enterprise that can truly compete in the world of cutting-edge technology.
![[Z Stage Special Feature] High-Precision Z Stage Suitable for Semiconductor Manufacturing and Inspection Equipment](https://image.mono.ipros.com/public/product/image/9ad/2000850118/IPROS62917766671577254461.png?w=280&h=280)
