Includes a quick reference table for approximately 120 types of target inventory! Offers various film deposition methods such as sputtering, evaporation, and CVD, and provides contract thin film processing.
Thin film deposition technology is used in a wide range of applications, including semiconductors and solar cells, as well as mold release films. From small-scale prototypes to mass production, we can provide thin film processing and deposition tailored to our customers' needs, thanks to our extensive know-how and comprehensive service system. You can view the target inventory quick reference table in the catalog.
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basic information
【Features】 ○ A rich inventory of target materials (about 120 types) and expertise in film formation (sputtering, evaporation, CVD) and etching (dry, wet) processes. ○ Contract prototyping for semiconductors, FPD, MEMS, solar cells, etc. ○ Reduction of development costs. ○ Implementation of speedy research and development. ○ Support for small-scale production. ● For more details, please refer to the catalog or contact us.
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Applications/Examples of results
【Applications】 ○ Contract processing for wet etching and dry etching ○ Dry etching can be performed using RIE, ICP, and DeepRIE (→ see etching equipment specifications) ○ Sacrificial layer etching (HF vapor etching) is also possible (→ see SEM images) ○ Contract processing is available primarily for silicon (Si) wafers, as well as glass and some metal etching (→ see SEM images) ○ In the photolithography process, options for contact, stepper, and EB drawing can be selected according to specifications ○ Contract processing for photolithography and etching of 3D shape patterns using grayscale masks is also available ○ Processing using ion milling is possible ● For more details, please refer to the catalog or contact us.
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