A wafer-oriented XY stage that achieves high-precision drive and high-precision positioning by leveraging the features of shaft motors.
※Exhibiting at SEMICON Japan from December 11 to 13, 2024, at Booth #3121! The shaft motor is a linear motor that achieves high-precision drive and high-precision positioning. This XY stage features… ♦ Parallel drive for both the upper and lower axes (driven by two motors with one amplifier and one set of encoders) ♦ A hollow structure stage made possible by the parallel drive ♦ A low-profile, simple structure XY stage that eliminates waste ♦ Customizable shaft motors that meet your desired load and operating conditions.
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basic information
High-precision step feed Operation with excellent constant speed and no speed ripple Agile settling time (high-speed tuning) This stage realizes the features of the shaft motor even in parallel drive.
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Applications/Examples of results
Semiconductor manufacturing equipment, inspection equipment, correction equipment, etc.
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Company information
As a mass production manufacturer of our unique next-generation cylindrical linear motor, the "shaft motor," which is incorporated into our self-developed manufacturing equipment, we have been widely utilized by equipment manufacturers, measurement and inspection equipment manufacturers, and processing equipment manufacturers for about 30 years since proposing the product to the market, focusing on high precision, high performance, and high added value. In the spring of 2023, we carried out the second factory expansion of our headquarters factory located in the Mogami region of Yamagata Prefecture, where our company originated, and together with our factory in Dalian, China, we are advancing the development of products and manufacturing systems to better meet our customers' needs. As the demand for high precision, high added value, and diversification of all products continues to grow, we hope to see the "shaft motor" utilized in even more opportunities.
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