CVD yttria is a high-purity protective film with excellent plasma resistance.
"CVD Yttria" is a transparent protective film with excellent plasma resistance. It is a dense film with high adhesion, making it effective as a protective film for windows used in plasma treatment processes (F-based, Cl-based).
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【Features】 - Covers the substrate surface with a yttria film that has excellent plasma resistance. - Forms a dense yttria film with high adhesion using the CVD method. - Impurity content in the yttria film: Na, Cu, Fe, Al < 0.2 wt ppm. - Compatible with 300mm parts. For more details, please contact us or download the catalog.
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Surface protection
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Quartz glass supporting cutting-edge semiconductor, LCD, and optical fields. Our company utilizes unique technological know-how in quartz glass processing to meet all needs, from large-scale processed products to precision processed products. We also perform cleaning of ceramics and silicon metals. Techno Quartz will contribute to the further development of cutting-edge technology through high-quality quartz glass products.