Ultra-thin stage with electric actuators arranged on a plane.
The slide section adopts a "preloaded double slide" structure that sandwiches an intermediate plate between two upper and lower plates. Numerous balls are arranged between each plate, enabling smooth planar rolling motion. Additionally, by placing three actuators on the same plane, a low center of gravity and ultra-thin simple structure are achieved, contributing to the miniaturization of the device.
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【Features】 ○ Achieves an ultra-thin simple structure by arranging three actuators on the same plane. ○ The "preloaded double slide" bears the load, so the actuators do not directly receive the load. This results in stable precision that is unaffected by load changes. ○ The table can be rotated around the center as well as any arbitrary coordinate point. ○ With the separately sold alignment stage dedicated controller, complex calculations and cumbersome software development are no longer necessary. ● For more details, please contact us or download the catalog.
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Heehaist Seiko, as a unique group that creates value, has been striving for "value creation" by leveraging its unique technologies and individuality developed over nearly half a century since its founding, and will continue to respond to the demands of the new era.