It is a high-performance digital mass flow meter with a variety of features.
This is a high-performance digital mass flow meter with a built-in microprocessor. 【Features】 ○ High precision achieved by adopting a high-resolution (16-bit) A/D and D/A converter ○ Standard alarm output function ○ Equipped with alarm status display LED ○ Auto-zero function included ○ Equipped with a general-purpose digital interface ○ Device number setting is possible ○ Maintains electrical compatibility with conventional products ○ Compact body size ○ Uses metal seals ○ Standard internal precision polishing of the body ○ Measurement of flow rates for various gases *For other functions and details, please download the catalog.
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basic information
- High precision achieved by adopting high-resolution (16-bit) A/D and D/A converters - Standard alarm output function - Equipped with alarm status display LED - Auto-zero function equipped - Equipped with a general-purpose digital interface - Device number setting is possible - Maintains electrical compatibility with conventional products - Compact body size - Metal seal adopted - Precision polishing inside the body is standard - Measurement of flow rates for various gases
Price range
P3
Delivery Time
P4
Applications/Examples of results
【Applications】 ○ Connected in series to MFCs that require high reliability to monitor flow anomalies ○ Flow measurement of corrosive gases ○ Leak tester ○ Flow monitor for combustion gases ○ Flow standard device
catalog（1）
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Company information
Since its establishment in 1987, Lintec has developed and commercialized unique technologies related to fluid measurement and control, such as constant temperature differential control flow sensors, DLI liquid vaporization supply systems, and flow sensors for strong acids. These products are used not only in semiconductor manufacturing but also in various industries including automotive and medical.
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