It is a high-speed response piezo control valve capable of controlling gases, liquids, and pressure.
The Biezokontrol Valve CV-3000 series is a high-speed response valve capable of controlling the flow of gases and liquids, as well as pressure control, through external control inputs. Both open-loop and closed-loop control methods can be used. 【Features】 - High-speed control is possible due to the use of stacked piezoelectric elements. - High thrust and high resolution allow for precise control of small flow rates and low pressures. - Capable of controlling the flow and pressure of both gases and liquids. - The connection part uses gold (Au) metal seals, making it virtually leak-free. - Particle-free materials and structural design. *For other functions and details, please download the catalog.
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basic information
- High-speed control is possible due to the use of stacked piezoelectric elements in the valve. - Precise control of small flow rates and low pressures is possible due to high thrust and high-resolution valves. - Flow control and pressure control for both gases and liquids are possible. - The connection part uses gold (Au) metal seals, making it virtually leak-free. - Particle-free materials and structural design.
Price range
P3
Delivery Time
P4
Applications/Examples of results
【Usage】 ○ Open loop control / Adjusting the valve opening based on external voltage (Precise flow control is difficult) ○ Closed loop control / Controllable to any flow rate by connecting a mass flow meter with a commercially available PID controller.
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Company information
Since its establishment in 1987, Lintec has developed and commercialized unique technologies related to fluid measurement and control, such as constant temperature differential control flow sensors, DLI liquid vaporization supply systems, and flow sensors for strong acids. These products are used not only in semiconductor manufacturing but also in various industries including automotive and medical.