Decompression and atmospheric pressure process vaporizer VU-206
This is a vaporizer that efficiently supplies various liquids with precise flow control in combination with the liquid mass flow meter LM-3000L series. 【Features】 ○ In combination with the liquid mass flow meter LM-3000L series, it allows for precise flow control of various liquid materials (TEOS, TEB, TEPO, etc.) while enabling high-efficiency vaporization. ○ Equipped with a piezo valve. ○ Compatible with processes from atmospheric pressure to reduced pressure. ○ Capable of heating up to 160°C. ○ Compact body size. ○ Compliant with RoHS. *For other functions and details, please download the catalog.
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basic information
- By combining with the liquid mass flow meter LM-3000L series, it enables precise flow control of various liquid materials (TEOS, TEB, TEPO, etc.) while also allowing for high-efficiency vaporization. - Equipped with a piezo valve. - Compatible with processes from atmospheric pressure to reduced pressure. - Capable of heating up to 160°C. - Compact body size. - Compliant with RoHS.
Price range
P3
Delivery Time
P4
Applications/Examples of results
It is widely supplied to semiconductor, LCD, solar cell, and electronic component manufacturers, as well as their equipment manufacturers. SiO2, TiO2, H2O, and other materials are used extensively for various film deposition applications, regardless of whether under reduced or atmospheric pressure.
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Company information
Since its establishment in 1987, Lintec has developed and commercialized unique technologies related to fluid measurement and control, such as constant temperature differential control flow sensors, DLI liquid vaporization supply systems, and flow sensors for strong acids. These products are used not only in semiconductor manufacturing but also in various industries including automotive and medical.
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