High-efficiency vaporizer for reduced pressure and atmospheric pressure processes, VU-430A series
VU-430A
High-efficiency vaporizer for reduced pressure and atmospheric pressure processes VU-430A
This is a vaporizer that efficiently supplies various liquids with precise flow control when combined with the liquid mass flow meter LM-3000L series (US PAT. 5372754). 【Features】 ○ By combining with the liquid mass flow meter LM-3000L series, it controls the flow of various liquids and efficiently vaporizes them (US PAT. 5372754). ○ Capable of operating from reduced pressure processes to atmospheric pressure processes. ○ High-temperature heating up to 200°C is possible. ○ Compact body size. ○ A wide variety of options according to the flow rate of the carrier gas (50CCM-4SLM). ○ RoHS compliant. *For other functions and details, please download the catalog.
Inquire About This Product
basic information
- By combining with the liquid mass flow meter LM-3000L series, various liquids can be flow-controlled and efficiently vaporized (US PAT.5372754). - Capable of processes from reduced pressure to atmospheric pressure. - High-temperature heating up to 200°C is possible. - Compact body size. - A wide variety corresponding to the flow rate of the carrier gas (50CCM-4SLM). - Compliant with RoHS.
Price range
P4
Delivery Time
P4
Applications/Examples of results
It is widely supplied to semiconductor, LCD, solar cell, and electronic component manufacturers, as well as their equipment manufacturers. SiO2, TiO2, H2O, and other materials are used extensively for various film deposition applications, regardless of whether under vacuum or at atmospheric pressure.
catalog（1）
Download All Catalogs
Company information
Since its establishment in 1987, Lintec has developed and commercialized unique technologies related to fluid measurement and control, such as constant temperature differential control flow sensors, DLI liquid vaporization supply systems, and flow sensors for strong acids. These products are used not only in semiconductor manufacturing but also in various industries including automotive and medical.