High-efficiency vaporizer for reduced pressure and normal pressure processes - VU-450 series
VU-450
High-efficiency vaporizer for reduced pressure and atmospheric pressure processes VU-450
This is a vaporizer that efficiently supplies various liquids with precise flow control when combined with the liquid mass flow meter LM-3000L series (US PAT. 5372754). 【Features】 ○ When combined with the liquid mass flow meter LM-3000L series, it allows for precise flow control of various liquids and efficient vaporization (US PAT. 5372754). ○ Capable of vaporizing water under atmospheric pressure conditions. ○ Heating up to 200°C is possible. ○ Compact body size. ○ A wide variety of options according to the flow rate of the carrier gas (1SLM to 100SLM). ○ RoHS compliant. *For other functions and details, please download the catalog.
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basic information
- By combining with the liquid mass flow meter LM-3000L series, various liquids can be precisely flow-controlled and efficiently vaporized (US PAT.5372754). - Vaporization supply of water is possible under atmospheric pressure conditions. - Heating up to 200°C is possible. - Compact body size. - A wide variety of options according to the flow rate of the carrier gas (1SLM to 100SLM). - RoHS compliant.
Price range
P4
Delivery Time
P4
Applications/Examples of results
It is widely supplied to semiconductor, liquid crystal, solar cell, and electronic component manufacturers, as well as their equipment manufacturers. SiO2, TiO2, H2O, and other materials are used extensively for various film deposition applications, regardless of whether under reduced or atmospheric pressure.
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Company information
Since its establishment in 1987, Lintec has developed and commercialized unique technologies related to fluid measurement and control, such as constant temperature differential control flow sensors, DLI liquid vaporization supply systems, and flow sensors for strong acids. These products are used not only in semiconductor manufacturing but also in various industries including automotive and medical.