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  6. MEMS scanner inspection system

MEMS scanner inspection system

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ALT−9A44

last updated:Jan 22, 2014

エーエルティー
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Ideal for inline inspection, MEMS scanner inspection system.

This is an inspection device for measuring the optical and electrical characteristics of MEMS optical scanners, designed for production lines and research and development. It is capable of measuring resonant-type resonance characteristics and drift. A new time measurement method allows for reduced inspection cycle times for maximum swing angle measurements. The interface can be electromagnetic drive, electrostatic drive, or piezoelectric drive. Its compact design makes it ideal for inline inspection. ○ Wobble measurement (triangular slit time variation detection method) Measurement resolution: 1 micrometer Measurement range: 30 minutes Beam speed: less than 4000 m/s ○ Jitter measurement (two-point time interval detection method) Set position: arbitrarily set (plus or minus 50 degrees) Measurement resolution: 0.1 ns ○ Maximum swing angle measurement: measurement resolution 0.1 ns ○ Resonant frequency: measurement resolution 0.1 ns ○ Temperature: measurement resolution 0.1 degrees

    Other measurement, recording and measuring instrumentsOptical microscopeImage Processing Equipment
MEMS_SYSTEM_small.jpg

MEMS scanner inspection system

MEMS_SYSTEM_small.jpg
MEMS_SYSTEM_small.jpg
  • Related Link - http://www.alt.co.jp

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basic information

This is an inspection device for measuring the optical and electrical characteristics of MEMS optical scanners, designed for production lines and research and development. It is capable of measuring resonant-type resonance characteristics and drift. A new time measurement method allows for reduced inspection cycle times for maximum swing angle measurements. The interface can be electromagnetic drive, electrostatic drive, or piezoelectric drive. Its compact design makes it ideal for inline inspection. ○ Wobble measurement (triangular slit time change detection method) Measurement resolution: 1 micrometer Measurement range: 30 minutes Beam speed: less than 4000 m/s ○ Jitter measurement (two-point time interval detection method) Set position: arbitrarily set (plus or minus 50 degrees) Measurement resolution: 0.1 ns ○ Maximum swing angle measurement: measurement resolution 0.1 ns ○ Resonant frequency: measurement resolution 0.1 ns ○ Temperature: measurement resolution 0.1 degrees

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Applications/Examples of results

Laser printer MEMS scanner inspection Laser printer MEMS scanner equipped LSU inspection Other MEMS optical scanner inspection

News about this product(5)

We will exhibit at Laser EXPO 2014.

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This time, ALT will be exhibiting at "Laser EXPO 2014." We will showcase laser pattern projectors and various laser light sources. We sincerely hope you will visit us. Date: April 23 (Wednesday) to 25 (Friday) Time: 10:00 AM to 5:00 PM Location: Pacifico Yokohama (Exhibition Hall B, C) Booth: J-2

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It has been published in the "Tokyo Industrial Location Navi."

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An interview article featuring our Takano has been published in the voices of companies located in the "Tokyo Industrial Location Navi." We would appreciate it if you could take a look. We are also distributing the "Optical MEMS Scanner Handbook," which summarizes our articles on optical MEMS. Please feel free to contact us. ALT Corporation mail: info@alt.co.jp tel: 03-5946-7336

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It was published in the January issue of the Light Alliance.

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In the January issue of Optical Alliance, an article by our Takano titled "Measurement of Optical MEMS Scanners" has been published. Please consider subscribing. We are also distributing a "Optical MEMS Scanner Handbook" that compiles our articles on Optical MEMS. Please feel free to contact us. ALT Corporation mail: info@alt.co.jp tel: 03-5946-7336

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Light MEMS Scanner Handbook Giveaway

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Our company, which has been focusing on optical MEMS scanners, has launched an information site titled "Optical MEMS Scanners that Open Up Tomorrow." We have now created a handbook introducing our optical MSME inspection equipment. It will be distributed to those who request it on a first-come, first-served basis. If you are interested, please feel free to contact us.

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Industrial Electrical Equipment

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We are a group of optomechatronics engineers that comprehensively engage in design development and manufacturing, including mechanisms, electronics, and software, based on laser optical application technologies. We will challenge ourselves in the application of laser light, particularly in laser scanning.

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