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  1. Home
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  3. Manufacturing and processing machinery
  4. Processing Machinery
  5. Other processing machines
  6. Excimer laser microfabrication device

Excimer laser microfabrication device

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last updated:Oct 01, 2010

ビーム
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It is a compact excimer laser micromachining device that can be installed on a tabletop.

By using an excimer laser, which operates at ultraviolet wavelengths, excellent processing quality can be achieved. It is effective for processing polymer resins, thin films, metal films, and glass materials.

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Excimer laser microfabrication device

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basic information

The "ProMaster," equipped with a compact excimer laser, is a fine processing system that can be installed on a desktop. The reduction projection magnification is fixed at 10 times, allowing for the setting of 32 types of mask motifs from a PC, and real-time observation of processing on the monitor. It is easy to create processing programs from CAD DXF files or text coordinate files, enabling other tasks to be performed during program execution. This device is optimal for quickly performing high-quality processing in a small installation area. ● Equipped with a compact excimer laser Wavelength 193 nm, maximum output 3 W, 300 Hz Wavelength 248 nm, maximum output 5 W, 300 Hz ● Space-saving processing optical system Despite the fixed reduction ratio of 10 times, it has a very compact design. It also includes a Z-axis adjustment mechanism and a mask selector. ● Real-time monitor screen Coaxial CCD monitor (approximately 300 times) ● Coaxial projection lighting It reliably illuminates the processing surface with lighting that is coaxial with the processing lens. ● Multifunctional control software - Processing area monitor screen - Simple measurement of processing dimensions - Support for programming processing, etc. *For more details, please inquire through the request for materials.

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Applications/Examples of results

Catheter microfabrication, microchannel processing, thin film removal processing, micro drilling processing, etc.

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Testing, Analysis and Measurement

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Our company aims to support technological innovation in Japanese enterprises and fulfill social contributions by introducing technologies and products that are the "only in the world," "number one in the world," or have the potential to be so, to our customers in Japan. We will focus our sales activities on items related to "laser microprocessing equipment," offering a lineup of processing equipment that utilizes lasers from IR to UV, with the goal of becoming a one-stop solution for laser microprocessing.

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