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~ Nitrogen Replacement Type Stocker for Suppressing Natural Oxide Film on Silicon Wafer Surfaces ~ ◆ Product Features ◆ - Reliable nitrogen replacement with a small amount of nitrogen - Energy-saving design - Faster nitrogen replacement speed compared to conventional products - Uniform distribution of oxygen concentration (variation within ±10% in each chamber) - Prevention of organic gas contamination through a non-seal method - Unique partial storage in each chamber to achieve isolation from the atmosphere
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~Nitrogen Replacement Type Stocker to Suppress Natural Oxide Film on Silicon Wafer Surface~ ◆Product Features◆ - Reliable nitrogen replacement with a small amount of nitrogen - Energy-saving design - Faster nitrogen replacement speed compared to conventional products - Uniform distribution of oxygen concentration (variation within ±10% in each chamber) - Prevention of organic gas contamination through non-seal method - Unique partial storage in each chamber to achieve isolation from the atmosphere
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Applications/Examples of results
◆Applications◆ - Suppression of natural oxide films and moisture absorption on silicon wafers, glass substrates, etc. - Prevention of oxidation of precision parts
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Dan Takuma Co., Ltd. has supplied numerous new products in the field of creating clean environments for the electronics and precision machining industries. Recently, we have contributed to the construction of ultra-clean spaces that eliminate not only particulate contamination but also molecular contamination. In addition to air purification, we address various requirements needed in clean rooms, such as precise control of temperature and humidity, and reduction of magnetic field fluctuations. We have also accumulated extensive technology in cleaning and drying, particularly for wafers, quartz tubes, and tools. Currently, these technologies are widely applied across various industries, leading to the launch of new products. Our goal is not only to supply equipment but also to establish total engineering and excellent after-sales service systems. While incorporating the concept of green procurement, we are committed to consistently meeting our customers' needs from planning to maintenance through our daily efforts.