List of Electron beam lithography equipment products

Hermetic feedthrough

• Electron beam lithography equipment
• Other semiconductor manufacturing equipment
• Analytical Equipment and Devices

Vacuum Non-Magnetic USM Drive Unit <Custom>

• Electron beam lithography equipment
• Other semiconductor manufacturing equipment
• Analytical Equipment and Devices

Aluminum sheet welding using fiber laser welding.

• Electron beam lithography equipment

Defects in the FPD cell panel can be corrected by cutting the ITO pattern.

• Electron beam lithography equipment
• Laser marker
• Other processing machines

The productivity is different from previous exposure devices!

• Electron beam lithography equipment
• Other semiconductor manufacturing equipment
• Resist Device

Surface treatment device for sputtering ion gun

• Sputtering Equipment
• Electron beam lithography equipment

Surface treatment device - Scanning ion gun

• Sputtering Equipment
• Electron beam lithography equipment

We take pride in being small, high-precision, and low power consumption, and by consistently producing from crystal processing, we are able to respond to our customers' demands in detail and with shor...

• Electron beam lithography equipment

5"6"9" mask case

• Electron beam lithography equipment
• Other clean room equipment and facilities
• Other optical parts

ＥＨ４３０Ｂ

• Semiconductor inspection/test equipment
• Electron beam lithography equipment
• Other processing machines

We have developed a voice coil type linear motor (VCM) suitable for positioning with a movement distance of several tens of millimeters for high-speed movement and ultra-precise positioning.

• Electron beam lithography equipment
• Servo
• Torque Control