EFEM(ウエハ) - List of Manufacturers, Suppliers, Companies and Products

EFEM Product List

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本装置は、2ステーションFOUP/FOSB対応EFEM（Equipment Front End Module）です。ウエハサイズは、200/300mm（8/12インチ）に対応しています。スループット：　150wph OCR / 450wph transfer（プロセス除く）

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EFEM(ウエハ) - List of Manufacturers, Suppliers, Companies and Products | IPROS GMS