[News] Aiming to expand the Ball SAW trace moisture meter into the semiconductor industry.
We have been selected for the 'Research and Development Type Startup Support Project / PCA'!
Ballwave Inc. applied for and was selected for the public recruitment related to the "Research and Development Type Startup Support Project / Product Commercialization Alliance (PCA)" of the National Research and Development Agency for New Energy and Industrial Technology Development in the fiscal year 2020. In the advanced semiconductor industry, the ultra-high precision and ultra-thinning of wiring patterns formed on semiconductor substrate surfaces are progressing to extreme levels. In these advanced semiconductor processes, even minute impurities that were not previously considered can cause product defects, so it is required to reduce impurities in the raw materials used to the utmost limit. In this research, we will conduct product development of a device that can inline monitor trace moisture in special gases used in advanced semiconductor processes, based on our high-speed response, compact, and highly sensitive sensor "Ball SAW Sensor," as well as the trace moisture meters FalconTrace and FalconTrace mini. *For more details, please refer to the PDF materials or feel free to contact us.
- Company:ボールウェーブ
- Price:Other