FPD various components, optical defect inspection equipment, unparalleled wide field of view, 5 times faster and higher resolution compared to conventional methods, ultra-wide field confocal type, high resolution of 1μm.
Ultra-wide field confocal type, high-resolution 1μm micro-defect inspection laser scanning imager. Conventional microscope optical systems and SEMs can observe narrow areas at high resolution but cannot easily observe wide areas. This challenge is addressed by the laser scanning imager. It can measure 3D shapes within a range of 50×50 mm. Measurement time: 1μm resolution approximately 35 seconds, 5μm resolution approximately 10 seconds. ● Measurement width: 0.8μm, depth: 5nm. ● Shape measurement is possible at a maximum tilt of 45 degrees. ● Can also detect defects such as scratches and deep holes.
Features of the laser scanning imager:
- A new observation device that overcomes the shortcomings of conventional microscopes, CCD cameras, and line sensors (no illumination device required).
- Newly developed dedicated scanning lens with a wide observation area (over 100 times that of a microscope) and long working distance.
- High-contrast laser confocal optical unit.
- The first raster scanning method in laser confocal microscope optics (capable of acquiring large area images with long and large images, equipped with multi-scan functionality).
- Outline specifications: High scanning resolution (up to 20,000 points per scan), scanning speed 4000 lines/second. The laser uses LD405nm (also available in 650 and 830nm).
- This is the first device that allows enlarged images to be viewed on a computer monitor.
- Company：ワイ・ドライブ
- Price：10 million yen-50 million yen
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