Compact Gas Introduction System "KGIS"
A heater is installed to ensure that the internal temperature of the system is uniform.
KGIS is a system designed to introduce gas into a chamber while maintaining the purity of the gas cylinder. Heaters are installed to ensure uniform temperature within the system. By minimizing moisture adsorption in the piping, dry gas can be introduced into the chamber. This product is suitable for the introduction of vent gas and process gas. 【Features】 ○ Design that considers temperature uniformity and insulation ○ Internal vacuum evacuation possible through the exhaust port ○ Dew point meter (optional) can be installed ○ Easy temperature control with the included temperature controller ○ Can be easily secured to the cylinder with the included band For more details, please contact us or download the catalog.
- 企業:北野精機
- 価格:Other