[Case Study] Magnetron Sputtering Simulation
By utilizing the particle method plasma analysis software Particle-PLUS, the behavior of atoms within the magnetron sputtering device is simulated.
Particle-PLUS is an excellent simulation software for numerical analysis of non-equilibrium plasma generated in rarefied gases. It can be utilized in applications such as magnetron sputtering, PVD, plasma CVD, capacitively coupled plasma (CCP), and dielectric barrier discharge (DBD). By utilizing the sputtered particle module among various modules (refer to the product description below), it is possible to determine the behavior of atoms sputtered from the target in plasma and neutral gas in magnetron sputtering devices, allowing for quick evaluation of flux distribution on opposing substrates. The analysis procedure involves using the particle and energy flux of the plasma obtained from the plasma module to determine the generation distribution and amount of sputtered particles, and tracking their motion using a particle method known as the test particle method.
- Company:ウェーブフロント 本社
- Price:1 million yen-5 million yen