Square gate valve
"Single gate valve" and "dual gate valve" are now available in the lineup!
This product is a vacuum gate valve for the process chamber of semiconductor manufacturing equipment. We offer a "single gate valve" that can handle back pressure with a cam-driven mechanism, and a "dual gate valve" that allows for complete horizontal movement without O-ring abrasion. Customization based on customer specifications is also available. 【Features】 〈Dual Gate Valve〉 ■ No O-ring abrasion due to complete horizontal movement ■ Improved maintenance of PM/TM chambers due to independent left and right drive ■ Compact design (same size as single valve) ■ Compatible with an opening of 45×450mm *For more details, please refer to the PDF document or feel free to contact us.
- Company:ナカンテクノ
- Price:Other