Based on customer feedback, we have improved the driving precision of the Hexapod! It now enables step movements of 40 nm on the XY axis and 20 nm on the Z axis.
We have been providing hexapod stages for over 20 years, and based on customer feedback, we have released a hexapod with enhanced drive precision!
It enables step movements of 40 nm on the XY axis and 20 nm on the Z axis. It can meet the highest demands for alignment and positioning applications in production and measurement technologies.
<Specifications>
- Drive Axes: 6 axes
- Travel Range: XY = ±50mm, Z = ±25mm, θxθy = ±15 degrees, θz = ±30 degrees
- Minimum Movement: XY = 40nm, Z = 20nm, θxθy = 0.2µrad, θz = 0.4µrad
- Maximum Speed: 2.5mm/second, 30mrad/second
- Load Capacity: 40Kg (horizontal)
- Arbitrary rotation center setting
For more details, please contact us or refer to the catalog.