Piezo Actuators P-882 and P-888 for Precision Machining
Ultra-high rigidity × sub-nanometer resolution, achieving long lifespan even in harsh environments.
In the field of precision measurement, measurements requiring nanometer-level accuracy and those conducted in harsh environments are essential. Various external factors, such as temperature changes, vibrations, and vacuum conditions, can affect measurement accuracy, making stable operation and high durability crucial. The PICMA(R) multilayer piezo actuator P-882 and P-888 address these challenges with high rigidity and environmental performance. 【Application Scenes】 - Scanning Probe Microscopes (SPM) - Semiconductor manufacturing equipment - Precision positioning of optical elements 【Benefits of Implementation】 - High-precision positioning with sub-nanometer resolution - Stable operation in harsh environments - Reduced maintenance costs due to increased lifespan
- Company:PI Japan
- Price:Other