Example of a cleaning device for single-layer semiconductor wafers.
Dual-sided cleaning device using a mega tube and spot-type shower for simultaneous surface and edge cleaning.
The mega tube and spot shower have been installed in the semiconductor wafer processing equipment. It is possible to install two vibrators in the narrow space within the chamber, allowing for simultaneous high-purity cleaning of the front and back surfaces as well as the edges. *You can check the video below.*
- Company:カイジョー ODM事業部
- Price:Other