ヒロテック List of Products and Services

The Trebor Corporation's QUANTUM NXT series ultrapure water heating device is designed to heat ultrapure water for cleaning in semiconductor manufacturing lines. Thanks to the manufacturer's patented heating method, it enables industry-leading ultra-fast heating and cooling, reaching the set temperature in about 40 seconds. Once the target temperature is reached, it can maintain the temperature with minimal power at a flow rate of zero, allowing for water and energy savings, making it an eco-innovative ultrapure water heating device that considers the environment.

• Heating device

The "UF Series Heater" is a ultra-pure flexible liquid heater that achieves fast response times and high-precision process control. Thanks to patented flexible heating technology, it can be installed in limited spaces. Additionally, by evolving existing PFA liquid paths into a flexible inline system, it can be easily integrated into existing liquid supply devices without being restricted by the location of use. 【Features】 ■ Patented heating technology ■ Top-level response time ■ High-purity liquid path ■ No nitrogen purge required ■ Compatible with liquid and gas *For more details, please refer to the PDF materials or feel free to contact us.

• Other heaters

The Celesco wire-type displacement sensor PT9420 is an explosion-proof model that has obtained intrinsic safety standards in Canada and Europe, with a maximum measurement length of 13,970 mm. The housing can be selected from a robust aluminum or stainless steel body. The output is 4-20 mA, and options for connectors and cables are available.

• Trolley
• lift
• crane

The Celesco wire-type displacement sensor PT8420 is an explosion-proof model that has obtained intrinsic safety standards in Canada and Europe. (Note: It must be used in conjunction with the specified Zener barrier.) The measurement length can accommodate up to a maximum of 1524mm, and the output is 4-20mA. The housing can be selected from aluminum and stainless steel (303 and 316). The protection rating is IP67 for environmental resistance.

• Incinerators and incinerators

The new SPD wire-type displacement sensor from Celesco features two outputs of 4-20mV and 0-10VDC. By attaching a dedicated sensor cover, it meets the IP67 protection rating, making it a highly versatile wire-type displacement gauge suitable for use in harsh environments such as outdoors.

• Other electronic measuring instruments

A robust and compact wire-type displacement sensor that incorporates a precision potentiometer within an aluminum housing. It features a long lifespan of 50 million cycles and a minimal tension of 0.3N, making it suitable for research on human muscle displacement, plant growth, and displacement measurement of actuators in aircraft cockpits.

• Distance measuring device

It is used for displacement measurement in various tests, including structural tests and crash tests of aircraft.

• Testing Equipment and Devices

Measurement range up to 762 mm Maximum acceleration up to 136 G Tension up to a maximum of 934 g

• Impact Test
• Other measurement, recording and measuring instruments

- Compact / Lightweight / Short-range / Low-cost - Measurement range: 0 to 120mm to 0 to 1270mm - Protection environment: NEMA1, IP50 - No failure when the wire is disconnected

• Impact Test
• Distance measuring device

Measurement range: Minimum 0 to 1905mm and maximum 0 to 13,970mm. For measurements beyond this, please consult us.

• Distance measuring device
• Other measurement, recording and measuring instruments

It is the world's smallest thumb-sized, so it can be used anywhere. The output is a precision potentiometer.

• Impact Test
• Other inspection equipment and devices

- Measurement range: 0 to 2032mm - Low cost / Mid-range use - Protection environment: IP50, IP67 - Thinner than SR and SP

• Testing Equipment and Devices

Since it is wire-type, no alignment is necessary. The drawer direction can be set from four directions.

• Distance measuring device

Accubath® Xe is designed for etching sapphire substrates, but we believe there are processes that can achieve higher throughput by operating at higher temperatures. The long processes due to the previous temperature limits of the baths may no longer be practical. This module enables processes at ultra-high temperatures that were previously impossible. We can build systems to tackle new challenges and provide them to our customers. By adopting the Accubath® Xe series baths, we are confident that you will be able to safely and reliably produce the processes you desire.

• Heating device
• Temperature and Humidity Control
• Other process controls

The SR1M is a model that achieves high performance at a low price for demanding outdoor and waterproof environments.

• Other measurement, recording and measuring instruments

The SR1E is a model designed for harsh outdoor environments that require waterproofing, achieving high performance at a low price.

• Other measurement, recording and measuring instruments

The SR1A is a model that achieves high performance at a low price for outdoor use and in demanding environments that require waterproofing.

• Other measurement, recording and measuring instruments

◆ Accurate flow control and stable quantitative operation during manual/automatic operation are achieved through the combination of a pure water controller, quartz tank, condenser, and securely sealed lid. ◆ Consistent boiling point (acid concentration), stability for the next process, and smooth supply. ◆ The most effective, reliable, and stable system for Si3N4 etching (nitriding etching).

• Etching Equipment
• Other semiconductors

A high-purity, disposable design air-driven diaphragm pump developed to uniquely solve conventional pump maintenance issues. 【Features】 ○ Composed of high purity and minimal number of parts through PFA injection molding, achieving high reliability and no leakage. ○ The disposable design allows for use in a high-purity state at a lower cost than overhauling. ○ No elastomer materials are used, eliminating the need for failure or replacement. ○ No metal parts are used, so there is no concern about contamination. ○ Maximum operating temperature: 55°C ○ Maximum discharge pressure: 0.55 MPa ○ Maximum discharge volume: 20L ● For more details, please request documentation or download the catalog.

• Other pumps

IMTEC, a company that has been providing cutting-edge wet process equipment in the semiconductor industry, confidently introduces AccuHeat, an inline heater made from high-purity quartz, boasting high efficiency, long life, and high reliability. Designed and manufactured based on over 20 years of experience, AccuHeat achieves high performance with low ownership costs and can be used in processes involving chemicals compatible with quartz. 【Features】 ◆ Inline heater using Inconel heater ◆ Exterior made of Teflon (PTFE) ◆ Does not reach high temperatures, eliminating the need for nitrogen purge and CDA cooling systems ◆ Excellent pressure resistance (4.2 Kg/cm²) ◆ Compact size; can be installed vertically or horizontally ◆ Available in 3KW and 6KW types ◆ 24-month warranty ◆ No maintenance required: no lamp replacement, mirror cleaning, or cooling system needed. ◆ Optimal heating: fast heating with precise temperature control without overshoot ◆ Compatible with various controllers; please contact us for more details.

• Other heaters

High performance and reliability in discharging high-purity liquid at low flow rates! Air-driven diaphragm pump capable of discharging liquid up to 100°C at 20 liters per minute. 【Features】 ○ Adjustable muffler ensures stable operation even under high back pressure/low flow conditions ○ Maximum operating temperature: 100°C ○ Maximum discharge pressure: 0.41 MPa ○ Maximum discharge volume: 20L ○ Double PFA diaphragm ○ Wetted parts made of PTFE/PFA ○ Long-lasting diaphragm ○ Quiet operation ○ Safe operation with air or nitrogen ○ Easy installation with quick-release base ○ Assembly, testing, and packaging in a clean room ● For more details, please request materials or download the catalog.

• Other pumps

Air-driven diaphragm pump ideal for high flow circulation or transfer of liquid medicines 【Features】 ○ Designed to prevent stalling, allowing operation from any condition ○ Maximum operating temperature: 100℃ ○ Maximum discharge pressure: 0.55MPa ○ Maximum discharge volume: 83L ○ Double PFA diaphragm ○ Non-metallic ○ Maintenance possible on-site ● For other functions and details, please request materials or download the catalog.

• Other pumps

Technically evolved Magnum 610, which has received high praise, high-definition diaphragm pump 【Features】 ○ Capable of circulating and transferring chemical solutions at 41 liters per minute up to 110°C ○ Equipped with ceramic shuttle valves, adjustable mufflers, screw-type heads, and PTFE diaphragms that do not generate flex ○ No metal parts or elastomer O-rings are used ○ Maintenance can be performed on-site ○ Low cost and short delivery time ○ Assembled, tested, and packaged in a clean room (Class 1000) ● For other functions and details, please download the catalog.

• Other pumps

Highly rated and praised from around the world: high-quality surface protection coating agent.

• Coating Agent

Diaphragm pump capable of discharging liquid up to 110 degrees at a rate of 36 liters per minute. 【Features】 ○ Maximum operating temperature: 100℃ ○ Maximum discharge pressure: 0.41MPa ○ Maximum discharge volume: 36L ○ Double PFA diaphragm ○ Wetted parts made of PTFE/PFA ○ Reduced maintenance costs (achieving longer maintenance intervals) ○ Long-lasting diaphragm ○ Assembly, testing, and packaging in a clean room ● For more details, please request documentation or download the catalog.

• Other pumps

Shield that guarantees complete uniformity at high illuminance.

• Fluorescent lamp

UL Certification Obtained, SEMI S3 Compliant IMTEC Temperature Control Bus 【Features】 ○ UL Certification Obtained ○ Compliant with SEMI S3 ○ Equipped with high-efficiency Inconel heater ○ Maintains uniform temperature distribution within the bus through optimal thermal conduction at low temperature output ○ Achieves high precision temperature stability ○ No need for heater replacement, significantly improved MTBF ● For other functions and details, please download the catalog.

• Thermostatic water bath

UL certified and CE marked, compliant with SEMI S2/S3 High purity quartz inline heater 【Features】 ○ Inline heater using Inconel heater ○ Exterior made of Teflon (PTFE) ○ Does not reach high temperatures, so nitrogen purge and CDA cooling devices are unnecessary ○ Excellent pressure resistance (4.2 Kg/cm²) ○ Compact size ○ Can be installed both vertically and horizontally ○ Diverse lineup ranging from 3 kW to 18 kW ● For other functions and details, please download the catalog.

• Other heaters

Reliable and stable quartz nitride etching system 【Features】 ○ Achieves stable boiling point management with appropriate pure water supply ○ Achieves temperature control of ±0.2℃ ○ Extended lifespan due to cooling mechanism at the sealing part with Axia Seal™ (optional), with a 30-month warranty ○ The most effective, reliable, and stable system for Si3N4 etching (nitride etching) ● For other functions and details, please download the catalog.

• Etching Equipment

Manufacturing Technology Stainless Steel Pressure Switch 【Features】 ○ High reproducibility ○ Usable even in high vacuum ○ Leak-free structure due to electron beam welding ○ Not affected by installation position ○ High pressure use possible (optional) ○ High temperature models also available ○ Uses gold and silver contacts ○ Achieves high precision, reproducibility, and lifespan by using “SNAP ACTION” Belleville springs ● For other functions and details, please download the catalog.

• switch

HF/KOH/solvent heating optimization SiC inline heater 【Features】 ○ Manufactured by IMTEC ○ Compatible with hydrofluoric acid and alkaline solutions (KOH, TMAH) ○ Uses SiC tubes ○ Direct attachment of the heater enables high-precision temperature control with optimal efficiency ○ The contact parts, made of SiC and PFA, prevent contamination compared to conventional heaters ○ Maintenance-free with no need for lamp replacement or CDA ○ Compact size ○ Can be installed vertically or horizontally ○ Space-saving design ○ Compatible with both circulation and single-pass processes ○ Diverse lineup ranging from 4.5 kW to 18 kW ● For other functions and details, please download the catalog.

• Other heaters

Manufactured by Beekman Manufacturing, USA Air and Water Pressure Aspirator 【Features】 ○ Molded with Teflon® ○ Utilizes the siphon phenomenon ○ Designed to handle hazardous chemicals effectively ○ Uses pressurized air ○ Reuse or circulation of chemicals ○ The water pressure aspirator can use pure water or tap water pressurized at 0.7 to 3.5 Kg/cm² for dilution, cooling, and disposal of waste liquids such as HF and H2SO4 ○ Both air pressure and water pressure models are available as standalone units or kits ● For other functions and details, please download the catalog.

• Piping Materials

Air-driven diaphragm pump ideal for corrosive and ultra-pure chemicals used in the semiconductor industry 【Features】 ○ Capable of circulating and transferring chemical liquids up to 180°C at a rate of 50 liters per minute ○ Compact with high discharge capacity ○ PTFE/PFA diaphragm ○ No metal parts or elastomer O-rings used ○ Stalling prevention shuttle valve ○ No controller required ○ Long lifespan of 200 million cycles ○ Maintenance possible on-site (easy inspection) ○ Low price and short delivery time ● For other functions and details, please download the catalog.

• Other pumps