Quartz bath for sapphire substrate etching ACCUBATH® Xe
IMTEC ACCULINE manufactured ACCUBATH® Xe-Series
Quartz bus developed for wet etching of sapphire substrates; the industry's first high-temperature compatible product usable up to 300°C.
Accubath® Xe is designed for etching sapphire substrates, but we believe there are processes that can achieve higher throughput by operating at higher temperatures. The long processes due to the previous temperature limits of the baths may no longer be practical. This module enables processes at ultra-high temperatures that were previously impossible. We can build systems to tackle new challenges and provide them to our customers. By adopting the Accubath® Xe series baths, we are confident that you will be able to safely and reliably produce the processes you desire.
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basic information
The liquid contact part of the Accubath Xe tank is entirely made of high-purity quartz, and there are no exposed Teflon fittings or sensors inside the tank. Additionally, the condensation coil and the automatic opening and closing lid are also made of quartz. To further enhance reliability, we have improved IMTEC's patented technology, Aquaseal®, to increase the thermal insulation effect from the heater components to the surroundings, preventing damage to the most critical seals. The housing is made of Halar®, which has higher heat and chemical resistance, and sufficient insulation measures have been implemented. Furthermore, a quartz aspirator has been adopted to discharge the liquid at ultra-high temperatures without waiting for the liquid temperature to drop. The discharged chemical solution is transferred to a cooldown tank equipped with cooling coils, located beneath the process tank, where it is cooled. Additionally, a backup tank capable of storing the entire tank capacity can be installed in case of tank damage.
Price information
Please consult separately.
Delivery Time
※Please consult separately.
Applications/Examples of results
Wet etching of sapphire substrates/GaN and shortening of etching time for silicon nitride, etc.
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Company information
We are a specialized trading company that imports and sells electronic and electrical equipment from overseas. We strive to quickly introduce products that apply cutting-edge technology from abroad to be of service to everyone. We handle products such as semiconductor equipment, semiconductor chemicals, printed circuit board transport devices, measuring instruments, and infrared heating devices, with each manufacturer producing very unique and distinctive products. In the semiconductor industry, the miniaturization of patterns is progressing, and as a result, the effectiveness of cleaning has become increasingly important. The products from IMTEC that we handle are used in semiconductor wet process lines around the world, known for their high performance, high efficiency, high purity, and ultra-high purity. TREBOR is always leading the industry in non-metal diaphragm pumps. Celesco measuring instruments can easily measure linear displacement or speed in various fields. Our motto is to prioritize trust, integrity, and prompt response, and we are a company that responds to customer needs in a timely manner.
