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  1. Home
  2. Industrial Electrical Equipment
  3. ヒロテック 東京営業所
  4. PSS (Patterned Sapphire Substrate) through wet etching is changing the LED industry!!
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  • Jan 23, 2013
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Jan 23, 2013

PSS (Patterned Sapphire Substrate) through wet etching is changing the LED industry!!

ヒロテック ヒロテック 東京営業所
About Patterned Sapphire Substrates (PSS) Using Wet Etching Currently, LED manufacturers have two completely different processes as options for their manufacturing processes. The dry etching method allows for the production of high-brightness, high-efficiency LEDs, but it requires a long time for manufacturing and has limitations on throughput. The wet etching method has a shorter manufacturing time and is highly scalable, but it cannot produce LEDs that are efficient or effective. However, in the case of the wet etching method, even when polishing and improving the wafer to enhance light extraction efficiency, significant cost reductions can be achieved compared to the dry etching method. Additionally, because it can scale up very efficiently, the cost reduction rate dramatically increases multiple times as throughput is increased and wafer sizes are expanded.
High-Temperature Quartz Bath for Sapphire Substrate Wet Etching "Xe-Series"
High-Temperature Quartz Bath for Sapphire Substrate Wet Etching "Xe-Series"
Etching pattern comparison
Etching pattern comparison
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Xe-Series.pdf[1150962]

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High-Temperature Etching Bath from IMTEC
Quartz bath for wet etching of sapphire substrates, high-temperature type "Xe-Series" ・Chemical temperature: up to 300℃ ・Liquid contact parts: all quartz ・Equipped with quartz aspirator for liquid discharge ・Equipped with recovery tank and emergency tank

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100586001.image_data.gif

High Purity Quartz Inline Heater

Uses high-purity quartz. An inline heater boasting high efficiency, long lifespan, and high reliability.

IMTEC, a company that has been providing cutting-edge wet process equipment in the semiconductor industry, confidently introduces AccuHeat, an inline heater made from high-purity quartz, boasting high efficiency, long life, and high reliability. Designed and manufactured based on over 20 years of experience, AccuHeat achieves high performance with low ownership costs and can be used in processes involving chemicals compatible with quartz. 【Features】 ◆ Inline heater using Inconel heater ◆ Exterior made of Teflon (PTFE) ◆ Does not reach high temperatures, eliminating the need for nitrogen purge and CDA cooling systems ◆ Excellent pressure resistance (4.2 Kg/cm²) ◆ Compact size; can be installed vertically or horizontally ◆ Available in 3KW and 6KW types ◆ 24-month warranty ◆ No maintenance required: no lamp replacement, mirror cleaning, or cooling system needed. ◆ Optimal heating: fast heating with precise temperature control without overshoot ◆ Compatible with various controllers; please contact us for more details.

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100586002.image_data.gif

Quartz Nitride Bus QN Series

We promise to provide the desired process control, ensuring that the boiling point of concentrated phosphoric acid is self-adjusted through refluxing in a safe, reliable, and rational manner.

◆ Accurate flow control and stable quantitative operation during manual/automatic operation are achieved through the combination of a pure water controller, quartz tank, condenser, and securely sealed lid. ◆ Consistent boiling point (acid concentration), stability for the next process, and smooth supply. ◆ The most effective, reliable, and stable system for Si3N4 etching (nitriding etching).

  • Other semiconductors
  • Etching Equipment

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SiC Inline Heater ACCUHEAT

SiC Inline Heater ACCUHEAT

HF/KOH/solvent heating optimization SiC inline heater 【Features】 ○ Manufactured by IMTEC ○ Compatible with hydrofluoric acid and alkaline solutions (KOH, TMAH) ○ Uses SiC tubes ○ Direct attachment of the heater enables high-precision temperature control with optimal efficiency ○ The contact parts, made of SiC and PFA, prevent contamination compared to conventional heaters ○ Maintenance-free with no need for lamp replacement or CDA ○ Compact size ○ Can be installed vertically or horizontally ○ Space-saving design ○ Compatible with both circulation and single-pass processes ○ Diverse lineup ranging from 4.5 kW to 18 kW ● For other functions and details, please download the catalog.

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bath.jpg

Temperature Control Bus ACCUBATH

Temperature Control Bus ACCUBATH

UL Certification Obtained, SEMI S3 Compliant IMTEC Temperature Control Bus 【Features】 ○ UL Certification Obtained ○ Compliant with SEMI S3 ○ Equipped with high-efficiency Inconel heater ○ Maintains uniform temperature distribution within the bus through optimal thermal conduction at low temperature output ○ Achieves high precision temperature stability ○ No need for heater replacement, significantly improved MTBF ● For other functions and details, please download the catalog.

  • Thermostatic water bath

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Night Ride H for Quartz Night Ride Reflux System ACCUBATH

Night Ride H System Quartz Night Ride Reflux System ACCUBATH

Reliable and stable quartz nitride etching system 【Features】 ○ Achieves stable boiling point management with appropriate pure water supply ○ Achieves temperature control of ±0.2℃ ○ Extended lifespan due to cooling mechanism at the sealing part with Axia Seal™ (optional), with a 30-month warranty ○ The most effective, reliable, and stable system for Si3N4 etching (nitride etching) ● For other functions and details, please download the catalog.

  • Etching Equipment

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Xe-Series.jpg

Quartz bath for sapphire substrate etching ACCUBATH® Xe

Quartz bus developed for wet etching of sapphire substrates; the industry's first high-temperature compatible product usable up to 300°C.

Accubath® Xe is designed for etching sapphire substrates, but we believe there are processes that can achieve higher throughput by operating at higher temperatures. The long processes due to the previous temperature limits of the baths may no longer be practical. This module enables processes at ultra-high temperatures that were previously impossible. We can build systems to tackle new challenges and provide them to our customers. By adopting the Accubath® Xe series baths, we are confident that you will be able to safely and reliably produce the processes you desire.

  • Heating device
  • Temperature and Humidity Control
  • Other process controls

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Related catalog(3)

SiC Inline Heater ACCUHEAT

SiC Inline Heater ACCUHEAT

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Temperature Control Bus ACCUBATH

Temperature Control Bus ACCUBATH

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  • Catalog download

Contact this catalog

Night Ride H for Quartz Night Ride Reflux System

Night Ride H for Quartz Night Ride Reflux System

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  • Catalog download

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Industrial Electrical Equipment
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Truck berth vehicle detection

It's not too late to address the "Logistics 2024 Problem." Why not immediately reduce drivers' waiting times?

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  • PRODUCT

Are you making progress on measures for the "2024 Problem"? With stricter management of drivers' working hours, reducing "waiting time" has become an urgent issue in the logistics field. To address this challenge, our company, Hotron, proposes the "Vehicle Detection Ultrasonic Sensor 'HM-UX2'," which instantly grasps the availability of loading bays. The 'HM-UX2' contributes to the resolution of waiting times by accurately understanding the availability situation, reducing unnecessary waiting and queueing, and shortening waiting times to alleviate the burden on drivers! By replacing the "eyes" of your loading bay management with this high-precision sensor, why not start addressing the "2024 Problem"? Take a look at the product features: "Can it accurately detect availability?" "Can we really use it in our company?" "I just want to know the cost, even if it's an estimate." If you have any questions or requests, please feel free to consult with us.

Aug 08, 2025

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Hidetoshi Tojo appointed as the representative executive president of the U.S. Anthropic Japan Corporation.

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Tokyo, August 7, 2025 - (JCN Newswire) - Anthropic, an AI research and development company that develops the cutting-edge AI model Claude, announced today the appointment of Hidetoshi Tojo as the Representative Executive Officer and President of its Japanese subsidiary. Tojo has extensive experience driving growth for technology companies in Japan, most recently serving as the President and Executive Officer of Snowflake's Japanese subsidiary, where he was involved from the launch of the business and achieved significant growth. He has also contributed to the advancement of data utilization in major Japanese companies by closely collaborating with various system integrators. Additionally, he has experience leading teams at Google Cloud Japan and Microsoft, both at their U.S. headquarters and Japanese subsidiaries. For more details, please refer to: https://acnnewswire.com/press-release/japanese/101731/

Aug 07, 2025

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◆Asano Corporation◆ Notice of Summer Vacation ★ Asano is a development support manufacturer for automobiles, motorcycles, bicycles, aircraft, space rockets, and more.

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  • OTHER

We sincerely apologize for the inconvenience, but Asano Co., Ltd. will be closed for summer vacation during the following period. We appreciate your understanding. Closure Period: August 13, 2025 (Wednesday) to August 17, 2025 (Sunday) Reopening: August 18, 2025 (Monday) <Inquiries> We will respond sequentially starting from August 18, 2025 (Monday). Asano Co., Ltd. is a manufacturer that supports the development of mobility parts, including automobiles, motorcycles, bicycles, aircraft, and space rockets. We conduct in-house integrated production of sheet metal, plastic, and composite products. We offer proposals for hybrid molding and multi-material bonding, among others. ■ Inquiries ■ Asano Co., Ltd. Headquarters and Gunma Factory 2718-1 Sanwa-cho, Isesaki City, Gunma Prefecture, 372-0011 TEL: 0270-75-1700 FAX: 0270-75-1600 MAIL: salesg@asano-japan.com Official YouTube Channel: https://www.youtube.com/@asano-japan

Aug 07, 2025

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Kit 1 θ/2 Method Contact Angle Analysis Software

New Product: Simple Contact Angle Meter Kit - Amazon Exclusive Model

  • NEW
  • PRODUCT

Newly released: Contact Angle Meter Entry Mini Kit Model, Amazon Exclusive Model JISR3257 compliant, includes θ/2 method and contact angle analysis software. Windows PC sold separately. Complete product priced at ¥399,300 (tax included). At the same time, we have started selling individual components for the contact angle meter kit as an Amazon exclusive model: "θ/2 Method Contact Angle Analysis Software" Kit 1, "Stage + Backlight + Housing" Kit 2, and "Dedicated USB Camera" Kit 3. The contact angle meter can be integrated into the device, allowing for the combination of "θ/2 Method Contact Angle Analysis Software" Kit 1 and "Dedicated USB Camera" Kit 3 for applications. Only the necessary elements such as software and camera can be combined. These models are exclusive to Amazon and will be sold and shipped by Amazon.co.jp.

Aug 07, 2025

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Our employee was featured in a special article in the Sanyo Shimbun.

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  • COMPANY

Our company, NICS Corporation (Headquarters: 1-11-1 Uno, Tamano City, Okayama Prefecture, President: Shinichiro Yamane), had an employee featured in the special article "New Star ★ Running" in the local economy section of the Sanyo Shimbun dated August 7.

Aug 07, 2025

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  • ケーブルマーキングや銘板などに! 耐水性 耐薬性 耐熱性 耐擦過性 ブラザー独自構造のラミネートラベル 実物ラベル サンプルプレゼント!
  • イプロスがリアル展示会を主催します! AI/DX 営業・マーケティング展 出展社募集中 リード数・商談数が止まらない!新しいリアル展示会を提供 会期 2026年3月24日(火)~25日(水) 会場 東京ビッグサイト東4ホール 出展概要資料を進呈!
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