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  1. Home
  2. Industrial Electrical Equipment
  3. ヒロテック 東京営業所
  4. PSS (Patterned Sapphire Substrate) through wet etching is changing the LED industry!!
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  • Jan 23, 2013
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Jan 23, 2013

PSS (Patterned Sapphire Substrate) through wet etching is changing the LED industry!!

ヒロテック ヒロテック 東京営業所
About Patterned Sapphire Substrates (PSS) Using Wet Etching Currently, LED manufacturers have two completely different processes as options for their manufacturing processes. The dry etching method allows for the production of high-brightness, high-efficiency LEDs, but it requires a long time for manufacturing and has limitations on throughput. The wet etching method has a shorter manufacturing time and is highly scalable, but it cannot produce LEDs that are efficient or effective. However, in the case of the wet etching method, even when polishing and improving the wafer to enhance light extraction efficiency, significant cost reductions can be achieved compared to the dry etching method. Additionally, because it can scale up very efficiently, the cost reduction rate dramatically increases multiple times as throughput is increased and wafer sizes are expanded.
High-Temperature Quartz Bath for Sapphire Substrate Wet Etching "Xe-Series"
High-Temperature Quartz Bath for Sapphire Substrate Wet Etching "Xe-Series"
Etching pattern comparison
Etching pattern comparison
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Xe-Series.pdf[1150962]

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High-Temperature Etching Bath from IMTEC
Quartz bath for wet etching of sapphire substrates, high-temperature type "Xe-Series" ・Chemical temperature: up to 300℃ ・Liquid contact parts: all quartz ・Equipped with quartz aspirator for liquid discharge ・Equipped with recovery tank and emergency tank

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100586001.image_data.gif

High Purity Quartz Inline Heater

Uses high-purity quartz. An inline heater boasting high efficiency, long lifespan, and high reliability.

IMTEC, a company that has been providing cutting-edge wet process equipment in the semiconductor industry, confidently introduces AccuHeat, an inline heater made from high-purity quartz, boasting high efficiency, long life, and high reliability. Designed and manufactured based on over 20 years of experience, AccuHeat achieves high performance with low ownership costs and can be used in processes involving chemicals compatible with quartz. 【Features】 ◆ Inline heater using Inconel heater ◆ Exterior made of Teflon (PTFE) ◆ Does not reach high temperatures, eliminating the need for nitrogen purge and CDA cooling systems ◆ Excellent pressure resistance (4.2 Kg/cm²) ◆ Compact size; can be installed vertically or horizontally ◆ Available in 3KW and 6KW types ◆ 24-month warranty ◆ No maintenance required: no lamp replacement, mirror cleaning, or cooling system needed. ◆ Optimal heating: fast heating with precise temperature control without overshoot ◆ Compatible with various controllers; please contact us for more details.

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100586002.image_data.gif

Quartz Nitride Bus QN Series

We promise to provide the desired process control, ensuring that the boiling point of concentrated phosphoric acid is self-adjusted through refluxing in a safe, reliable, and rational manner.

◆ Accurate flow control and stable quantitative operation during manual/automatic operation are achieved through the combination of a pure water controller, quartz tank, condenser, and securely sealed lid. ◆ Consistent boiling point (acid concentration), stability for the next process, and smooth supply. ◆ The most effective, reliable, and stable system for Si3N4 etching (nitriding etching).

  • Other semiconductors
  • Etching Equipment

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SiC Inline Heater ACCUHEAT

SiC Inline Heater ACCUHEAT

HF/KOH/solvent heating optimization SiC inline heater 【Features】 ○ Manufactured by IMTEC ○ Compatible with hydrofluoric acid and alkaline solutions (KOH, TMAH) ○ Uses SiC tubes ○ Direct attachment of the heater enables high-precision temperature control with optimal efficiency ○ The contact parts, made of SiC and PFA, prevent contamination compared to conventional heaters ○ Maintenance-free with no need for lamp replacement or CDA ○ Compact size ○ Can be installed vertically or horizontally ○ Space-saving design ○ Compatible with both circulation and single-pass processes ○ Diverse lineup ranging from 4.5 kW to 18 kW ● For other functions and details, please download the catalog.

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bath.jpg

Temperature Control Bus ACCUBATH

Temperature Control Bus ACCUBATH

UL Certification Obtained, SEMI S3 Compliant IMTEC Temperature Control Bus 【Features】 ○ UL Certification Obtained ○ Compliant with SEMI S3 ○ Equipped with high-efficiency Inconel heater ○ Maintains uniform temperature distribution within the bus through optimal thermal conduction at low temperature output ○ Achieves high precision temperature stability ○ No need for heater replacement, significantly improved MTBF ● For other functions and details, please download the catalog.

  • Thermostatic water bath

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Night Ride H for Quartz Night Ride Reflux System ACCUBATH

Night Ride H System Quartz Night Ride Reflux System ACCUBATH

Reliable and stable quartz nitride etching system 【Features】 ○ Achieves stable boiling point management with appropriate pure water supply ○ Achieves temperature control of ±0.2℃ ○ Extended lifespan due to cooling mechanism at the sealing part with Axia Seal™ (optional), with a 30-month warranty ○ The most effective, reliable, and stable system for Si3N4 etching (nitride etching) ● For other functions and details, please download the catalog.

  • Etching Equipment

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Xe-Series.jpg

Quartz bath for sapphire substrate etching ACCUBATH® Xe

Quartz bus developed for wet etching of sapphire substrates; the industry's first high-temperature compatible product usable up to 300°C.

Accubath® Xe is designed for etching sapphire substrates, but we believe there are processes that can achieve higher throughput by operating at higher temperatures. The long processes due to the previous temperature limits of the baths may no longer be practical. This module enables processes at ultra-high temperatures that were previously impossible. We can build systems to tackle new challenges and provide them to our customers. By adopting the Accubath® Xe series baths, we are confident that you will be able to safely and reliably produce the processes you desire.

  • Heating device
  • Temperature and Humidity Control
  • Other process controls

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Related catalog(3)

SiC Inline Heater ACCUHEAT

SiC Inline Heater ACCUHEAT

PRODUCT
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Temperature Control Bus ACCUBATH

Temperature Control Bus ACCUBATH

PRODUCT
  • E-book viewing
  • Catalog download

Contact this catalog

Night Ride H for Quartz Night Ride Reflux System

Night Ride H for Quartz Night Ride Reflux System

PRODUCT
  • E-book viewing
  • Catalog download

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Industrial Electrical Equipment
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[Cast Iron Crack] We will repair cracks in metal products without applying heat.

  • NEW
  • COMPANY

The "Mechanical Stitching Method" by Nichinichisui Road Machinery Co., Ltd. is a new technique that allows for the repair of metal cracks without the application of heat. By using special bolts and reinforcement plates, cracks are physically removed, and repairs are made without causing any thermal impact on the base material. Repairs can be carried out even in environments where open flames cannot be used. Since no heat is applied, the disassembly of equipment is kept to a minimum. ◎ For more details, please contact us. ◎ If a detailed technical explanation is needed, please contact us.

May 11, 2026

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【Metal Crack Repair】We repair cracks in metal products without applying heat.

  • NEW
  • CATALOG

The "Mechanical Stitch Method" by Nichinichisui Road Machinery Co., Ltd. is a new technique that allows for the repair of metal cracks without the application of heat. By using special bolts and reinforcement plates, cracks are physically removed, and repairs are made without causing any thermal impact to the base material. Repairs can be carried out in environments where open flames cannot be used. Since no heat is applied, the disassembly of equipment is minimized. ◎ For more details, please contact us. ◎ If a detailed technical explanation is needed, please contact us.

May 11, 2026

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Announcement of the logistics feature publication! Along with this, the product page has also been significantly expanded.

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  • COMPANY

\ Logistics Solutions Featured in "Logistics Special" / Starting today, our logistics solutions are featured in the "Logistics Special" section of Ipros Monozukuri. In this feature, we introduce challenges and considerations related to packaging and packing processes, as well as tips for on-site improvements. This content is useful for a wide range of individuals, from those in the information-gathering stage to those actively considering implementation. If you are considering a review or improvement of your packaging and packing processes, please take this opportunity to check it out. Furthermore! \ Significant Expansion of Product Pages / In conjunction with the feature in the Logistics Special, we have expanded the content of our product pages. To make it easier for customers to consider solutions tailored to their challenges and processes, we have organized the solution structures and related products and options. We encourage you to utilize this as concrete material for improving your packaging and packing processes. If you have any questions, please feel free to contact us. Thank you very much for your continued support.

May 11, 2026

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Non-contact light touch sensor "HA-T401/HA-T520"

A non-contact light touch sensor "HA-T Series" that realizes "wanting to open in a narrower range and in a limited manner" based on the surrounding environment of automatic doors.

  • NEW
  • PRODUCT

The non-contact beam touch sensor "HA-T401/HA-T520" has a compact detection range, making it an ideal automatic door sensor for installation on automatic doors facing narrow corridors or busy streets. Depending on the application and installation location, you can choose between "non-vision mounting type" and "non-vision built-in type." 【Features】 ● With the beam touch sensor, you can open and close the automatic door simply by bringing your hand close without touching it, ensuring hygiene. ● Depending on the installation environment, such as single sliding or bi-parting doors, the detection range can be set in four ways: left, center, right, with 4 spots and 12 spots settings. ● Two types of activation row settings are available to reduce unnecessary opening and closing of the automatic door due to cross traffic, contributing to energy-saving effects. ● The touch switch and infrared sensor are integrated, allowing for a switch between beam touch and infrared sensor modes with a single model. 【Recommended for such places!】 ☑ Entrances facing busy corridors ☑ Counters or signs near the door ☑ Buildings facing narrow corridors ☑ Buildings that prioritize aesthetics ☑ Hospitals and facilities that consider hygiene ☑ Large facilities with many doors ◎ For more details, please download the materials or contact us.

May 11, 2026

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Membrane filter

MS Product Campaign

  • NEW
  • EVENT

Membrane-Solutions LLC will be conducting a limited-time campaign for its filter products. Campaign Period: December 2, 2024 (Monday) to March 31, 2025 (Monday) During the campaign, the following products will be sold at special prices: - Membrane filters - Filter vials * Syringe filters and custom products are not included in the campaign. Samples of the eligible products are also available. For more details, please check the special page on our website. Special page URL: https://www.daichem.co.jp/products/hplc_accessory/ms_filter_campaign.html/

May 11, 2026

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  • 展示会出展等の販売促進に必要な費用を助成します! 最大300万円 助成率1/2以内 市場開拓助成事業 展示会等参加費・印刷物制作費・動画制作費 など 申請受付:令和8年 5/15(金)~5/29(金)
  • 排気熱風なく気温-4.1℃の冷風を 工事不要で暑さ対策 店舗・工場の安全対策に!気化式スポットクーラー Pure Drive
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