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  1. Home
  2. Industrial Electrical Equipment
  3. ヒロテック 東京営業所
  4. PSS (Patterned Sapphire Substrate) through wet etching is changing the LED industry!!
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  • Jan 23, 2013
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Jan 23, 2013

PSS (Patterned Sapphire Substrate) through wet etching is changing the LED industry!!

ヒロテック ヒロテック 東京営業所
About Patterned Sapphire Substrates (PSS) Using Wet Etching Currently, LED manufacturers have two completely different processes as options for their manufacturing processes. The dry etching method allows for the production of high-brightness, high-efficiency LEDs, but it requires a long time for manufacturing and has limitations on throughput. The wet etching method has a shorter manufacturing time and is highly scalable, but it cannot produce LEDs that are efficient or effective. However, in the case of the wet etching method, even when polishing and improving the wafer to enhance light extraction efficiency, significant cost reductions can be achieved compared to the dry etching method. Additionally, because it can scale up very efficiently, the cost reduction rate dramatically increases multiple times as throughput is increased and wafer sizes are expanded.
High-Temperature Quartz Bath for Sapphire Substrate Wet Etching "Xe-Series"
High-Temperature Quartz Bath for Sapphire Substrate Wet Etching "Xe-Series"
Etching pattern comparison
Etching pattern comparison
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Xe-Series.pdf[1150962]

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High-Temperature Etching Bath from IMTEC
Quartz bath for wet etching of sapphire substrates, high-temperature type "Xe-Series" ・Chemical temperature: up to 300℃ ・Liquid contact parts: all quartz ・Equipped with quartz aspirator for liquid discharge ・Equipped with recovery tank and emergency tank

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100586001.image_data.gif

High Purity Quartz Inline Heater

Uses high-purity quartz. An inline heater boasting high efficiency, long lifespan, and high reliability.

IMTEC, a company that has been providing cutting-edge wet process equipment in the semiconductor industry, confidently introduces AccuHeat, an inline heater made from high-purity quartz, boasting high efficiency, long life, and high reliability. Designed and manufactured based on over 20 years of experience, AccuHeat achieves high performance with low ownership costs and can be used in processes involving chemicals compatible with quartz. 【Features】 ◆ Inline heater using Inconel heater ◆ Exterior made of Teflon (PTFE) ◆ Does not reach high temperatures, eliminating the need for nitrogen purge and CDA cooling systems ◆ Excellent pressure resistance (4.2 Kg/cm²) ◆ Compact size; can be installed vertically or horizontally ◆ Available in 3KW and 6KW types ◆ 24-month warranty ◆ No maintenance required: no lamp replacement, mirror cleaning, or cooling system needed. ◆ Optimal heating: fast heating with precise temperature control without overshoot ◆ Compatible with various controllers; please contact us for more details.

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100586002.image_data.gif

Quartz Nitride Bus QN Series

We promise to provide the desired process control, ensuring that the boiling point of concentrated phosphoric acid is self-adjusted through refluxing in a safe, reliable, and rational manner.

◆ Accurate flow control and stable quantitative operation during manual/automatic operation are achieved through the combination of a pure water controller, quartz tank, condenser, and securely sealed lid. ◆ Consistent boiling point (acid concentration), stability for the next process, and smooth supply. ◆ The most effective, reliable, and stable system for Si3N4 etching (nitriding etching).

  • Other semiconductors
  • Etching Equipment

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SiC Inline Heater ACCUHEAT

SiC Inline Heater ACCUHEAT

HF/KOH/solvent heating optimization SiC inline heater 【Features】 ○ Manufactured by IMTEC ○ Compatible with hydrofluoric acid and alkaline solutions (KOH, TMAH) ○ Uses SiC tubes ○ Direct attachment of the heater enables high-precision temperature control with optimal efficiency ○ The contact parts, made of SiC and PFA, prevent contamination compared to conventional heaters ○ Maintenance-free with no need for lamp replacement or CDA ○ Compact size ○ Can be installed vertically or horizontally ○ Space-saving design ○ Compatible with both circulation and single-pass processes ○ Diverse lineup ranging from 4.5 kW to 18 kW ● For other functions and details, please download the catalog.

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bath.jpg

Temperature Control Bus ACCUBATH

Temperature Control Bus ACCUBATH

UL Certification Obtained, SEMI S3 Compliant IMTEC Temperature Control Bus 【Features】 ○ UL Certification Obtained ○ Compliant with SEMI S3 ○ Equipped with high-efficiency Inconel heater ○ Maintains uniform temperature distribution within the bus through optimal thermal conduction at low temperature output ○ Achieves high precision temperature stability ○ No need for heater replacement, significantly improved MTBF ● For other functions and details, please download the catalog.

  • Thermostatic water bath

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Night Ride H for Quartz Night Ride Reflux System ACCUBATH

Night Ride H System Quartz Night Ride Reflux System ACCUBATH

Reliable and stable quartz nitride etching system 【Features】 ○ Achieves stable boiling point management with appropriate pure water supply ○ Achieves temperature control of ±0.2℃ ○ Extended lifespan due to cooling mechanism at the sealing part with Axia Seal™ (optional), with a 30-month warranty ○ The most effective, reliable, and stable system for Si3N4 etching (nitride etching) ● For other functions and details, please download the catalog.

  • Etching Equipment

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Xe-Series.jpg

Quartz bath for sapphire substrate etching ACCUBATH® Xe

Quartz bus developed for wet etching of sapphire substrates; the industry's first high-temperature compatible product usable up to 300°C.

Accubath® Xe is designed for etching sapphire substrates, but we believe there are processes that can achieve higher throughput by operating at higher temperatures. The long processes due to the previous temperature limits of the baths may no longer be practical. This module enables processes at ultra-high temperatures that were previously impossible. We can build systems to tackle new challenges and provide them to our customers. By adopting the Accubath® Xe series baths, we are confident that you will be able to safely and reliably produce the processes you desire.

  • Heating device
  • Temperature and Humidity Control
  • Other process controls

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Related catalog(3)

SiC Inline Heater ACCUHEAT

SiC Inline Heater ACCUHEAT

PRODUCT
  • E-book viewing
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Temperature Control Bus ACCUBATH

Temperature Control Bus ACCUBATH

PRODUCT
  • E-book viewing
  • Catalog download

Contact this catalog

Night Ride H for Quartz Night Ride Reflux System

Night Ride H for Quartz Night Ride Reflux System

PRODUCT
  • E-book viewing
  • Catalog download

Contact this catalog

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[Catalog] Glass Tube Area Flow Meter / Metal Tube Area Flow Meter (Revised Edition)

  • NEW
  • PRODUCT

Variable Area Flowmeters Reliable quality designed to world standards When measuring the flow of high-pressure or high-temperature liquids and gases that are not suitable for plastic, our robust "glass tube variable area flowmeter (rotameter)" allows for more accurate flow measurement. It offers a wider flow range and is suitable for various liquids and gases! Contents ■ Glass tube variable area flowmeters / Metal tube variable area flowmeter lineup ■ Custom design solutions ■ Accessories & replacement parts ■ Support for technical documentation and compliance with various regulatory requirements ■ Services and support, etc.

Feb 06, 2026

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■■ Leak test for pouch containers such as packed rice! | MSQ-2003 series ■■ Packaging container air leak test device, pinhole inspection device, and full inspection device.

  • NEW
  • PRODUCT

The pinhole inspection for packaging engineering is fully automated, eliminating packaging defects based on certain quality standards. The judgment results and operational status can be managed via a monitor screen. - Quantitative management of quality standards for the pinhole inspection process - Ensuring the quality of the product's shelf life - Establishing evaluation criteria for the manufacturing process, achieving quantitative quality assurance - Slim and space-saving design that can be connected to existing production lines - Quick changeover for product variety switching can be handled in a short time by exchanging chambers - Fully domestically produced, allowing for rapid maintenance and troubleshooting - Example target works: pillow packaging, packaged rice (packaged cooked rice), etc. *Please consult us regarding the use of this product for pharmaceuticals.

Feb 06, 2026

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Fukuda's leak test, leak inspection, leak detection, leak test, integrity test.

  • NEW
  • PRODUCT

Fukuda Co., Ltd. has been pursuing leak detection for 60 years and is committed to advancing the future of leak testing. 【 Supporting Various Leak Tests: Air Leak Test / Gas Leak Test (Hydrogen Gas, Helium Gas) 】 We develop, manufacture, and sell leak testing equipment to inspect airtightness and sealing properties. We will propose the appropriate testers and devices for each inspection target. 【 Target Industries and Examples of Inspection Targets 】 - Automotive Industry: Engines, FC components, valves and piping, various parts - Electronic Components Industry: Smartphones, keyless switches, various small sensors - Pharmaceuticals / Food / Cosmetics Industry: Bottle containers, syringes, vials, eye drop containers, pillow packaging, PTP packaging We will propose the most suitable leak testers for each industry. 【 ISO Certification 】JIS Q 9001:2015 (ISO 9001:2015)

Feb 06, 2026

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■■ Air Leak Tester | FLA-0200 / FLA-0201 series ■■ Fukuda's new flagship model. Equipped with mastering correction function, it enables high-precision measurements in a short time.

  • NEW
  • PRODUCT

Fukuda's new flagship model. - Masterless type (FLA-0200 series) - General type (FLA-0201 series) Two models of air leak testers. With the mastering correction function, high-precision measurements can be achieved in a short time. Please take a look at the catalog.

Feb 06, 2026

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PFAS Regulation Countermeasures! ■■ Leak Test Equipment for Small Electronic Components|MSA-0101 series ■■ Does not use fluorinated inert fluids. PFAS-free. Offers accuracy equal to or better than liquid immersion testing.

  • NEW
  • PRODUCT

● This is a leak testing device for small electronic components that does not use fluorinated inert liquids (PFAS-free). ● There is no longer a need for unstable visual confirmation through liquid immersion testing. It adopts a quantitative testing method that allows for stable pressure leak testing. ● It is a tabletop leak testing device specifically for gross leaks, with accuracy equal to or greater than that of liquid immersion testing. ● The detectable range is approximately 1×10⁻² Pa·m³/s to 1×10⁻⁶ Pa·m³/s (varies depending on the target product). ● It is suitable for sealed structures ranging from a few millimeters to a maximum of 80 × 70 mm. Please feel free to contact us for more information!

Feb 06, 2026

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