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  1. Home
  2. Industrial Electrical Equipment
  3. ヒロテック 東京営業所
  4. PSS (Patterned Sapphire Substrate) through wet etching is changing the LED industry!!
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  • Jan 23, 2013
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Jan 23, 2013

PSS (Patterned Sapphire Substrate) through wet etching is changing the LED industry!!

ヒロテック ヒロテック 東京営業所
About Patterned Sapphire Substrates (PSS) Using Wet Etching Currently, LED manufacturers have two completely different processes as options for their manufacturing processes. The dry etching method allows for the production of high-brightness, high-efficiency LEDs, but it requires a long time for manufacturing and has limitations on throughput. The wet etching method has a shorter manufacturing time and is highly scalable, but it cannot produce LEDs that are efficient or effective. However, in the case of the wet etching method, even when polishing and improving the wafer to enhance light extraction efficiency, significant cost reductions can be achieved compared to the dry etching method. Additionally, because it can scale up very efficiently, the cost reduction rate dramatically increases multiple times as throughput is increased and wafer sizes are expanded.
High-Temperature Quartz Bath for Sapphire Substrate Wet Etching "Xe-Series"
High-Temperature Quartz Bath for Sapphire Substrate Wet Etching "Xe-Series"
Etching pattern comparison
Etching pattern comparison
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Xe-Series.pdf[1150962]

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High-Temperature Etching Bath from IMTEC
Quartz bath for wet etching of sapphire substrates, high-temperature type "Xe-Series" ・Chemical temperature: up to 300℃ ・Liquid contact parts: all quartz ・Equipped with quartz aspirator for liquid discharge ・Equipped with recovery tank and emergency tank

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100586001.image_data.gif

High Purity Quartz Inline Heater

Uses high-purity quartz. An inline heater boasting high efficiency, long lifespan, and high reliability.

IMTEC, a company that has been providing cutting-edge wet process equipment in the semiconductor industry, confidently introduces AccuHeat, an inline heater made from high-purity quartz, boasting high efficiency, long life, and high reliability. Designed and manufactured based on over 20 years of experience, AccuHeat achieves high performance with low ownership costs and can be used in processes involving chemicals compatible with quartz. 【Features】 ◆ Inline heater using Inconel heater ◆ Exterior made of Teflon (PTFE) ◆ Does not reach high temperatures, eliminating the need for nitrogen purge and CDA cooling systems ◆ Excellent pressure resistance (4.2 Kg/cm²) ◆ Compact size; can be installed vertically or horizontally ◆ Available in 3KW and 6KW types ◆ 24-month warranty ◆ No maintenance required: no lamp replacement, mirror cleaning, or cooling system needed. ◆ Optimal heating: fast heating with precise temperature control without overshoot ◆ Compatible with various controllers; please contact us for more details.

  • Other heaters

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100586002.image_data.gif

Quartz Nitride Bus QN Series

We promise to provide the desired process control, ensuring that the boiling point of concentrated phosphoric acid is self-adjusted through refluxing in a safe, reliable, and rational manner.

◆ Accurate flow control and stable quantitative operation during manual/automatic operation are achieved through the combination of a pure water controller, quartz tank, condenser, and securely sealed lid. ◆ Consistent boiling point (acid concentration), stability for the next process, and smooth supply. ◆ The most effective, reliable, and stable system for Si3N4 etching (nitriding etching).

  • Other semiconductors
  • Etching Equipment

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SiC Inline Heater ACCUHEAT

SiC Inline Heater ACCUHEAT

HF/KOH/solvent heating optimization SiC inline heater 【Features】 ○ Manufactured by IMTEC ○ Compatible with hydrofluoric acid and alkaline solutions (KOH, TMAH) ○ Uses SiC tubes ○ Direct attachment of the heater enables high-precision temperature control with optimal efficiency ○ The contact parts, made of SiC and PFA, prevent contamination compared to conventional heaters ○ Maintenance-free with no need for lamp replacement or CDA ○ Compact size ○ Can be installed vertically or horizontally ○ Space-saving design ○ Compatible with both circulation and single-pass processes ○ Diverse lineup ranging from 4.5 kW to 18 kW ● For other functions and details, please download the catalog.

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bath.jpg

Temperature Control Bus ACCUBATH

Temperature Control Bus ACCUBATH

UL Certification Obtained, SEMI S3 Compliant IMTEC Temperature Control Bus 【Features】 ○ UL Certification Obtained ○ Compliant with SEMI S3 ○ Equipped with high-efficiency Inconel heater ○ Maintains uniform temperature distribution within the bus through optimal thermal conduction at low temperature output ○ Achieves high precision temperature stability ○ No need for heater replacement, significantly improved MTBF ● For other functions and details, please download the catalog.

  • Thermostatic water bath

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Night Ride H for Quartz Night Ride Reflux System ACCUBATH

Night Ride H System Quartz Night Ride Reflux System ACCUBATH

Reliable and stable quartz nitride etching system 【Features】 ○ Achieves stable boiling point management with appropriate pure water supply ○ Achieves temperature control of ±0.2℃ ○ Extended lifespan due to cooling mechanism at the sealing part with Axia Seal™ (optional), with a 30-month warranty ○ The most effective, reliable, and stable system for Si3N4 etching (nitride etching) ● For other functions and details, please download the catalog.

  • Etching Equipment

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Xe-Series.jpg

Quartz bath for sapphire substrate etching ACCUBATH® Xe

Quartz bus developed for wet etching of sapphire substrates; the industry's first high-temperature compatible product usable up to 300°C.

Accubath® Xe is designed for etching sapphire substrates, but we believe there are processes that can achieve higher throughput by operating at higher temperatures. The long processes due to the previous temperature limits of the baths may no longer be practical. This module enables processes at ultra-high temperatures that were previously impossible. We can build systems to tackle new challenges and provide them to our customers. By adopting the Accubath® Xe series baths, we are confident that you will be able to safely and reliably produce the processes you desire.

  • Heating device
  • Temperature and Humidity Control
  • Other process controls

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Related catalog(3)

SiC Inline Heater ACCUHEAT

SiC Inline Heater ACCUHEAT

PRODUCT
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Temperature Control Bus ACCUBATH

Temperature Control Bus ACCUBATH

PRODUCT
  • E-book viewing
  • Catalog download

Contact this catalog

Night Ride H for Quartz Night Ride Reflux System

Night Ride H for Quartz Night Ride Reflux System

PRODUCT
  • E-book viewing
  • Catalog download

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Industrial Electrical Equipment
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When the sensor detects a car, it notifies pedestrians of the car's departure with the light of a rotating beacon!

Perfect for entrances and exits of parking lots and stores! Notify pedestrians of vehicle departures with the light from the rotating beacon! Here is a proposal for a departure warning sensor!

  • NEW
  • CATALOG

[To the owners of parking lots and parking lot construction companies] "I'm worried about the possibility of colliding with pedestrians when exiting the parking lot..." Among vehicle entrances to parking lots, stores, residences, and factories, those facing sidewalks or roadways are particularly prone to dangerous incidents such as collisions with pedestrians or between vehicles. To alleviate such concerns, Hotron proposes a [Vehicle Exit Warning Sensor] that detects vehicle departures at various sites and alerts the surroundings with LED lights and buzzers. The system consists of a simple configuration of "Sensor" + "Controller" + "Switching Power Supply (24V)" + "LED Rotating Light." *When using the exit warning system, we kindly ask customers to arrange for the switching power supply (24V), LED rotating light, control panel, circuit breaker, etc. Since it can be retrofitted, it can also be used for existing parking lot entrances. [Contents Included] ○ Vehicle Exit Warning System Configuration ○ Comparison Table of Exit Warning Sensors ○ Four Modes ○ Wide Range of Applications ○ Customer Feedback ○ Appearance Diagram / Specifications ◎ For more details, please contact us or download the catalog.

Sep 24, 2025

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Non-contact light beam touch sensor 'HA-T401'

Recommended for infection control! Introduction of non-contact sensors for facilities.

  • NEW
  • COMPANY

In recent times, there has been a growing interest in infection control measures and facility hygiene management. Our company offers non-contact sensor products that are recommended for commercial facilities, food factories, and nursing and caregiving facilities. 【Sensors for Automatic Doors】 ● Light Touch Sensor HA-T401 … When you wave your hand in front of the automatic door, the sensor detects the movement and opens or closes the door. It is recommended for making doors that use touch switches non-contact. ● Hand Wave Sensor PF-R5, PF-U2, DHS-1 … Opens and closes the automatic door by waving your hand in front of the sensor. ● Foot Switch PF-01S/01D/03S/05 … Opens and closes the automatic door by placing your foot in the opening. 【Access Control System】 ● Face Recognition + Unmanned Temperature Measurement DS Series … Capable of detecting mask-wearing and measuring body temperature simultaneously with face recognition. ● Automatic Disinfectant Spray Dispenser PHW-03B … Automatically sprays disinfectant when you wave your hand in front of the sensor. 【Nursing and Care Sensors】 ● Infrared Bed Exit Sensor "Just Place It Pole-kun" … This bed exit sensor is installed next to the bed and alerts via nurse call when the subject enters the detection range. ◎ For more details, please download the catalog or contact us.

Sep 24, 2025

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Aluminum prototype: Lost wax casting sand mold layered 3D printer prototype.

  • NEW
  • COMPANY

● The production time for casting prototypes can be shortened! Since model production is not required, the time needed to create prototypes, which previously took about a month, can be significantly reduced. ● Model costs can be reduced! By directly producing sand molds from 3D data, there is no need for model production costs. If changes to the model are necessary, they can be addressed by modifying the 3D data. ● Similar products with different shapes and dimensions can be prototyped simultaneously! With one molding process, different products with similar shapes or varying dimensions can be molded at the same time. This allows for the verification of multiple types in a short period.

Sep 24, 2025

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"Welding repair crack repair" We will repair metal cracks without applying heat.

  • NEW
  • PRODUCT

The "Mechanical Stitching Method" by Nichinichisui Road Machinery Co., Ltd. is a new technique that allows for the repair of metal cracks without the application of heat. By using special bolts and reinforcement plates, cracks are physically removed, and repairs are made without causing any thermal impact to the base material. Repairs can be carried out in environments where open flames cannot be used. Since no heat is applied, the disassembly of equipment is minimized. ◎ For more details, please contact us. ◎ If you require a detailed technical explanation, please contact us.

Sep 24, 2025

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JBC Soldering News: Online Store for Soldering Equipment Launched

  • NEW
  • COMPANY

Finally, the long-awaited JBC brand soldering equipment direct sales online store has been launched. Free shipping nationwide in Japan, and all products of the JBC brand are available for purchase. More than 10 types of soldering tips, with quantity discounts for over 50. From the latest model compact stations to consumables, please be sure to visit our website.

Sep 22, 2025

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  • PFAS規制に対応 PFASフリー コーティング剤 ・潤滑性を付与 摩擦低減、耐摩耗性向上 ・離型性を付与 撥水・撥油性、非粘着 など、多様の用途で提案が可能 素材は、金属・プラスチック・ゴムなど問いません!
  • イプロスがリアル展示会を主催します! AI/DX 営業・マーケティング展 出展社募集中 リード数・商談数が止まらない!新しいリアル展示会を提供 会期 2026年3月24日(火)~25日(水) 会場 東京ビッグサイト東4ホール 出展概要資料を進呈!
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