エムエス機器 List of News Articles

The "ThermoRack401" offers high reliability and is suitable for laser applications. This product, with a cooling capacity of 400W, maintains a temperature accuracy of ±0.05°C even near room temperature. The drive mechanism achieves whisper-like quietness and vibration-free operation with just two points of support, making it capable of meeting the temperature control requirements for advanced optical and laser applications. The core electronic temperature control module has a lifespan exceeding 200,000 hours and is equipped with a universal power supply compatible with power sources worldwide. For more details, please refer to the related product page or PDF documentation below.

The 'TCubeEdge' with a maximum cooling capacity of 290W optimizes the performance of equipment with excellent temperature reliability, resulting in high profitability. It quickly responds to temperature changes in circulating water and achieves a reproducibility of ±0.05°C even near room temperature in temperature control ranging from 0°C to 65°C. The centrifugal pump, which ensures smooth flow, operates without vibration and can meet the temperature control requirements for various applications in lasers, optics, and analytical instruments. For more details, please refer to the related product page or PDF materials below.

The 'ThermoCube' with cooling capacities of 200W, 300W, 400W, and 600W maintains a temperature stability of ±0.05°C even near room temperature, with whisper-like quietness and low vibration. The core electronic temperature control module has a lifespan of over 200,000 hours and is equipped with a universal power supply compatible with power sources worldwide. It offers a variety of options and features a design that allows for easy customization. This chiller is environmentally friendly, using no refrigerants. For more details, please refer to the related product page or PDF materials below.

The "ThermoRack1201" is a temperature control chiller that can control cooling and heating with quick temperature response and a temperature stability of ±0.05℃, without using refrigerant gases. It features a design optimized for plasma etching in semiconductor manufacturing processes, improving the quality variation between wafers and lots. It is compatible with products from major etcher manufacturers. The temperature control unit consists of seven Peltier devices, and even if one device malfunctions, it continues to operate while maintaining approximately 85% of its capacity. For more details, please refer to the related product page or PDF materials below.

The "ThermoRack1801" is a temperature control chiller that can control cooling and heating with a quick temperature response and a temperature stability of ±0.05℃, without using refrigerants. It features a design optimized for plasma etching in semiconductor manufacturing processes, which can improve the quality variation between wafers and lots. The temperature control unit consists of seven Peltier devices, and even if one device malfunctions, it can operate while maintaining approximately 85% of its capacity. For more details, please refer to the related product page or PDF materials below.

The "ThermoRack1201/1801" is a temperature control chiller that can control cooling and heating with a rapid temperature response and a temperature stability of ±0.05℃, without using refrigerants. It features a design optimized for plasma etching in semiconductor manufacturing processes, which can improve the quality variation between wafers and lots. The temperature control unit consists of seven Peltier devices, and even if one device malfunctions, it continues to operate while maintaining approximately 85% of its capacity. For more details, please refer to the related product page or PDF materials below.

Many devices used in the semiconductor manufacturing process require cooling equipment (chillers) to remove generated heat and maintain a constant temperature. Thermo Fisher Scientific's "Chillers for Semiconductor Manufacturing" are designed to provide high productivity, long-term reliability, and easy operability that does not induce operational errors, and they are OEM models designed according to the specifications of various equipment manufacturers. For more details, please refer to the related product page below.

We have started selling refurbished used chillers from Thermo Fisher Scientific that have been overhauled using genuine parts. The delivery time is approximately two months from order to delivery, and it comes with a six-month manufacturer warranty. For more details, please refer to the related product page below.

This product is a chiller that exhibits high cooling capacity while being very compact, thanks to the combination of a highly reliable high-performance Peltier module and a heat exchange plate developed by Solid State Cooling Systems, which has unique patented technology. Since it does not use any refrigerants, there are no usage restrictions due to GWP regulations or inspection work for refrigerant management. Additionally, it uses very few mechanical parts, resulting in low vibration and noise, and reducing issues caused by wear and deterioration. It is also suitable for integration into devices. For more details, please refer to the related product page or PDF materials below.

Fluorinated solvents are widely used as temperature control circulating fluids for semiconductor manufacturing equipment and various measuring instruments due to their high insulation properties. Additionally, they are non-flammable, inert, and highly safe, making them suitable for cooling devices in clean rooms. This fluorinated circulating fluid is paired with specially designed chillers. <Peltier Chillers> ■ThermoRack1201/1801 ■ThermoCube ■NIKOLA3K/5K <Refrigeration Chillers> ■M-75HFE For more details, please refer to the related product pages or PDF materials below.

We have started handling refurbished chillers from Thermo Fisher Scientific. After performing an overhaul using genuine parts, delivery is possible in about 1 to 2 months. A 6-month manufacturer warranty is also included.