エムエス機器 Company Profile

Fluorinated solvents are widely used as temperature control circulating fluids for semiconductor manufacturing equipment and various measuring instruments due to their high insulation properties. Additionally, they are non-flammable, inert, and highly safe, making them suitable for cooling devices in clean rooms. This fluorinated circulating fluid is paired with specially designed chillers. <Peltier Chillers> ■ThermoRack1201/1801 ■ThermoCube ■NIKOLA3K/5K <Refrigeration Chillers> ■M-75HFE For more details, please refer to the related product pages or PDF materials below.

The "ThermoRack1201/1801" is a temperature control chiller that can control cooling and heating with a rapid temperature response and a temperature stability of ±0.05℃, without using refrigerants. It features a design optimized for plasma etching in semiconductor manufacturing processes, which can improve the quality variation between wafers and lots. The temperature control unit consists of seven Peltier devices, and even if one device malfunctions, it continues to operate while maintaining approximately 85% of its capacity. For more details, please refer to the related product page or PDF materials below.

This product is a chiller that exhibits high cooling capacity while being very compact, thanks to the combination of a highly reliable high-performance Peltier module and a heat exchange plate developed by Solid State Cooling Systems, which has unique patented technology. Since it does not use any refrigerants, there are no usage restrictions due to GWP regulations or inspection work for refrigerant management. Additionally, it uses very few mechanical parts, resulting in low vibration and noise, and reducing issues caused by wear and deterioration. It is also suitable for integration into devices. For more details, please refer to the related product page or PDF materials below.