Plasma Etcher Chiller "ThermoRack1201/1801"

The "ThermoRack1201/1801" is a temperature control chiller that can control cooling and heating with a rapid temperature response and a temperature stability of ±0.05℃, without using refrigerants.
It features a design optimized for plasma etching in semiconductor manufacturing processes, which can improve the quality variation between wafers and lots.
The temperature control unit consists of seven Peltier devices, and even if one device malfunctions, it continues to operate while maintaining approximately 85% of its capacity.
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